Study on the Burr Formation Process in Micro Milling of High Aspect Ratio Structures

2021 ◽  
Author(s):  
Xinlei Zhang ◽  
Ni Chen ◽  
Jinming Wu ◽  
Jiawei Wei ◽  
Bo Yan ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Formation Mechanism ◽  
High Aspect Ratio ◽  
Formation Process ◽  
Element Model ◽  
Micro Milling ◽  
Burr Formation ◽  
Machining Accuracy ◽  
Machined Surface ◽  
Micro Structures

Abstract High-aspect-ratio (HAR) micro-structures of harden steel (SKD11) are widely used in the national defense and electronic fields. Micro-milling is a suitable method for machining HAR micro structures, however the inevitable generation of burrs deteriorates the machined surface. Previous studies have mostly focused on the burr formation process of shallow grooves, but have ignored HAR grooves. This paper investigated the burr formation mechanism in HAR (2:1) grooves on harden steel (SKD11). Due to the fact that the burr formation process was difficult to be observed in the actual micro-milling process, a finite element model was established. A corresponding experimental research was conducted, which revealed a good consistency between simulation and experimental results. Moreover, a new burr type was formed on the sidewall of the HAR groove, which was transformed from top burrs and was named as side burr. The results demonstrated that the chip flow on the rake face of the micro-mill was hindered by the sidewall, which caused chip crumbling, chip accumulation, and surface scraping, seriously affecting the burr formation mechanism. This paper revealed the burr formation mechanism for HAR grooves, and provided research direction for improving the machining accuracy of HAR grooves.

Investigation on micro-milling of micro-grooves with high aspect ratio and laser deburring

2019 ◽  
Vol 234 (5) ◽  
pp. 871-880 ◽  
Author(s):  
Yinfei Yang ◽  
Jinjin Han ◽  
Xiuqing Hao ◽  
Liang Li ◽  
Ning He
Keyword(s):  
Aspect Ratio ◽  
Tool Wear ◽  
Surface Quality ◽  
High Aspect Ratio ◽  
High Conductivity ◽  
Cutting Fluid ◽  
Micro Milling ◽  
Free Alcohol ◽  
Processing Efficiency ◽  
Machined Surface

High aspect ratio micro-grooves are critical structures in the micro-electromechanical system. However, problems like rapid tool wear, low processing efficiency, and inferior machined quality in micro-milling of high aspect ratio micro-grooves by length–diameter ratio tools are particularly significant. In this work, a combined micro-milling method based on water-free alcohol as the cutting fluid and laser deburring is proposed to investigate the high aspect ratio micro-groove generation of oxygen-free high-conductivity copper TU1. Parametric experiments and high aspect ratio micro-groove experiments were conducted to investigate the surface quality, cutting forces, and tool wear. The water-free alcohol was employed to improve the tool life and machined surface quality. In the case of the oxygen-free high-conductivity copper TU1 material, a satisfactory high aspect ratio micro-groove (groove-width = 0.2 μm and aspect ratio = 2.5) with a nanoscale surface roughness ( Ra = 68 nm) was obtained under the preferred machining conditions. Furthermore, the deburring process of the high aspect ratio micro-groove by the laser technology was conducted to achieve ideal machined quality of the top surfaces.

Laser hybridizing with micro-milling for fabrication of high aspect ratio micro-groove on oxygen-free copper

2021 ◽  
Vol 70 ◽  
pp. 15-25
Author(s):  
Xiuqing Hao ◽  
Wenhao Xu ◽  
Mengyue Chen ◽  
Chen Wang ◽  
Jinjin Han ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Micro Milling

Formation of GaN Self-Organized Nanotips by Nanomasking Effect

2001 ◽  
Vol 707 ◽  
Author(s):  
Harumasa Yoshida ◽  
Tatsuhiro Urushido ◽  
Hideto Miyake ◽  
Kazumasa Hiramtsu
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Aspect Ratio ◽  
Formation Mechanism ◽  
High Aspect Ratio ◽  
Photoelectron Spectroscopy ◽  
Nanometer Scale ◽  
Xps Analysis ◽  
X Ray ◽  
Self Organized

ABSTRACTWe have successfully fabricated self-organized GaN nanotips by reactive ion etching using chlorine plasma, and have revealed the formation mechanism. Nanotips with a high density and a high aspect ratio have been formed after the etching. We deduce from X-ray photoelectron spectroscopy (XPS) analysis that the nanotip formation is attributed to nanometer-scale masks of SiO2 on GaN. The structures calculated by Monte Carlo simulation of our formation mechanism are very similar to the experimental nanotip structures.

Study on Machining Mechanism of Glass Using Discrete Element Method

2014 ◽  
Vol 577 ◽  
pp. 108-111 ◽  
Author(s):  
Ying Qiu ◽  
Mei Lin Gu ◽  
Feng Guang Zhang ◽  
Zhi Wei
Keyword(s):  
Discrete Element Method ◽  
Element Model ◽  
Discrete Element ◽  
Rake Angle ◽  
Milling Process ◽  
Micro Milling ◽  
Discrete Element Model ◽  
Machined Surface ◽  
Damage Depth ◽  
Element Method

The discrete element method (DEM) is applied to glass micromachining in this study. By three standard tests the discrete element model is established to match the main mechanical properties of glass. Then, indentating, cutting, micro milling process are simulated. Results show that the vertical damage depth is prevented from reaching the final machined surface in cutting process. Tool rake angle is the most remarkable factor influencing on the chip deformation and cutting force. The final machined surface is determined by the minimum cutting thickness per edge. Different cutting thickness, cutter shape and spindle speed largely effect on the mechanism of glass.

High-Aspect-Ratio Electroplated Structures With 2μm Beamwidth

1999 ◽  
Author(s):  
Xiaobin Li ◽  
Siddharth Kiyawat ◽  
Hector J. De Los Santos ◽  
Chang-Jin “CJ” Kim
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Stress Gradient ◽  
Optimization Method ◽  
Nickel Layer ◽  
Driving Voltage ◽  
Aspect Ratios ◽  
Nickel Electroplating ◽  
Electroplating Process ◽  
Micro Structures

Abstract Narrow beamwidth is highly desirable for many micromechanical elements moving parallel to the substrate. A good example is the electrostatically driven flexure structure, whose driving voltage is determined by the width of the beam. This paper presents the process flow and the result of a high-aspect-ratio electroplating process using photoresist (PR) molds. Following a systematic optimization method, PR molds with aspect ratios up to 4.0 were fabricated with a beamwidth of only 2.1μm. Higher aspect ratios, up to 6.8, were achieved using PR double coating technique, with a beamwidth of 2.6μm. Using a Cr/Cu seed layer, nickel electroplating was successfully carried out to translate the PR molds into nickel micro-structures. We observed bend-down of the fully released nickel cantilevers that are over 8μm thick. Further investigation suggested a combined effect of residual stress gradient in the electroplated nickel layer and in-use stiction of the cantilever beams.

Synthesis of TiO2-Based Nanotube on Ti Substrate by Hydrothermal Treatment

2007 ◽  
Vol 7 (2) ◽  
pp. 668-672 ◽  
Author(s):  
Bo Chi ◽  
Erick S. Victorio ◽  
Tetsuro Jin
Keyword(s):  
Aspect Ratio ◽  
Pore Size ◽  
Hydrothermal Treatment ◽  
Formation Mechanism ◽  
High Aspect Ratio ◽  
Hydrothermal Conditions ◽  
Titanate Nanotube ◽  
Naoh Solution ◽  
Nanofiber Film

TiO2-based titanate nanotube film was directly synthesized by hydrothermal treatment of Ti substrate in NaOH solution. The prepared high aspect ratio nanotubes have diameter of 10nm and pore size of 5 nm with length of several microns. The nanotubes show the same structure and component characteristics as the nanotubes prepared through hydrothermal treatment of TiO2. Other nanostructured titanate as oriented nanofiber film and translucent film were also prepared by adjusting the hydrothermal conditions. The formation mechanism of nanostructured titanate was discussed.

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