Global optimization of an encapsulated Si/SiO2 L3 cavity with a 43 million quality factor
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Abstract We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Qc = 4.33 × 107 , which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.
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2017 ◽
Vol 56
(9)
◽
pp. 090304
◽
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