Current Image Atomic Force Microscopy (CI-AFM) Combined with Atomic Force Probing (AFP) for Location and Characterization of Advanced Technology Node

2004 ◽  
Author(s):  
Tom X. Tong ◽  
A. N. Erickson
Keyword(s):  
Atomic Force Microscopy ◽  
Failure Analysis ◽  
Advanced Technology ◽  
Current Image ◽  
Force Microscopy ◽  
Nano Scale ◽  
Atomic Force ◽  
Fundamental Limitation ◽  
Standard Techniques

Abstract Many of the standard techniques of Failure Analysis (FA) are breaking down or becoming less useful as feature sizes drop below 100nm. The tenth micron milestone appears to be a fundamental limitation to many common techniques. Use of Current Image-Atomic Force Microscopy (CI-AFM) combined with Atomic Force Probing (AFP) brings about a combination of technologies, which allow for extension of FA below the nano-scale.

Conductive-AFM for Failure Analysis of Parametric Test Structures in Advanced Technology Development

2017 ◽  
Author(s):  
Chuan Zhang ◽  
Esther P.Y. Chen
Keyword(s):  
Atomic Force Microscopy ◽  
Failure Analysis ◽  
Failure Modes ◽  
Technology Development ◽  
Advanced Technology ◽  
Conductive Atomic Force Microscopy ◽  
Parametric Test ◽  
Conductive Afm ◽  
Force Microscopy ◽  
Atomic Force

Abstract A variety of parametric test structures were designed with the purpose of characterizing parameters tied to failure modes for specific structures, and the electrical test of the parametric test structures are typically conducted earlier inline, which could be months ahead of the functional test. Due to the unique advantages, conductive-atomic force microscopy (CAFM) was introduced to parametric test structure failure analysis during advanced technology development, and has been proven to be a powerful solution to many challenging failure analysis (FA) problems. This paper uses several case studies to illustrate how CAFM can be used to successfully localize defects in challenging parametric test structures that would otherwise be invisible with conventional FA techniques.

Die-Level Scanning Capacitance Microscopy Fault Isolation on SOI Fin-FET Devices for Advanced Semiconductor Nodes

2018 ◽  
Author(s):  
Lucile C. Teague Sheridan ◽  
Tanya Schaeffer ◽  
Yuting Wei ◽  
Satish Kodali ◽  
Chong Khiam Oh
Keyword(s):  
Atomic Force Microscopy ◽  
Failure Analysis ◽  
Fault Isolation ◽  
Scanning Capacitance Microscopy ◽  
Force Microscopy ◽  
Atomic Force

Abstract It is widely acknowledged that Atomic force microscopy (AFM) methods such as conductive probe AFM (CAFM) and Scanning Capacitance Microscopy (SCM) are valuable tools for semiconductor failure analysis. One of the main advantages of these techniques is the ability to provide localized, die-level fault isolation over an area of several microns much faster than conventional nanoprobing methods. SCM, has advantages over CAFM in that it is not limited to bulk technologies and can be utilized for fault isolation on SOI-based technologies. Herein, we present a case-study of SCM die-level fault isolation on SOI-based FinFET technology at the 14nm node.

Stereometric characterization of Dinizia excelsa Ducke wood from Amazon rainforest using atomic force microscopy

2021 ◽  
Author(s):  
Willian Silva Conceição ◽  
Ştefan Ţălu ◽  
Robert Saraiva Matos ◽  
Glenda Quaresma Ramos ◽  
Fidel Guereiro Zayas ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Amazon Rainforest ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dinizia Excelsa

Mechanical characterization of cellulose single nanofiber by atomic force microscopy

2017 ◽  
Author(s):  
Lindong Zhai ◽  
Jeong Woong Kim ◽  
Jiyun Lee ◽  
Jaehwan Kim
Keyword(s):  
Atomic Force Microscopy ◽  
Mechanical Characterization ◽  
Force Microscopy ◽  
Atomic Force

Characterization of Electron Emission from High Density Self-Aligned Si-Based Quantum Dots by Conducting-Probe Atomic Force Microscopy

2014 ◽  
Vol 64 (6) ◽  
pp. 923-928 ◽  
Author(s):  
D. Takeuchi ◽  
K. Makihara ◽  
A. Ohta ◽  
M. Ikeda ◽  
S. Miyazaki
Keyword(s):  
Quantum Dots ◽  
Atomic Force Microscopy ◽  
Electron Emission ◽  
High Density ◽  
Force Microscopy ◽  
Atomic Force

Characterization of mitochondria isolated from normal and ischemic hearts in rats utilizing atomic force microscopy

Micron ◽  
2011 ◽  
Vol 42 (3) ◽  
pp. 299-304 ◽  
Author(s):  
Gi-Ja Lee ◽  
Su-Jin Chae ◽  
Jae Hoon Jeong ◽  
So-Ra Lee ◽  
Sang-Jin Ha ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force

Characterization of carbon films microstructure by atomic force microscopy and Raman spectroscopy

1994 ◽  
Vol 76 (6) ◽  
pp. 3443-3447 ◽  
Author(s):  
J. M. Yáñez‐Limón ◽  
F. Ruiz ◽  
J. González‐Hernández ◽  
C. Vázquez‐López ◽  
E. López‐Cruz
Keyword(s):  
Raman Spectroscopy ◽  
Atomic Force Microscopy ◽  
Carbon Films ◽  
Force Microscopy ◽  
Atomic Force

Characterization of Batch-Microfabricated Scanning Electrochemical-Atomic Force Microscopy Probes

2005 ◽  
Vol 77 (2) ◽  
pp. 424-434 ◽  
Author(s):  
Phillip S. Dobson ◽  
John M. R. Weaver ◽  
Mark N. Holder ◽  
Patrick R. Unwin ◽  
Julie V. Macpherson
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force
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