Structural Characterization of HfNx-based Films Grown by Metal Organic Chemical Vapor Deposition

2008 ◽  
Vol 14 (1) ◽  
pp. 99-103 ◽  
Author(s):  
Chang Chun Chen
2008 ◽  
Vol 104 (2) ◽  
pp. 024301 ◽  
Author(s):  
David F. Brown ◽  
Stacia Keller ◽  
Feng Wu ◽  
James S. Speck ◽  
Steven P. DenBaars ◽  
...  

1999 ◽  
Vol 38 (Part 1, No. 9B) ◽  
pp. 5437-5441 ◽  
Author(s):  
Kosuke Shiratsuyu ◽  
Atsushi Sakurai ◽  
Katsuhiko Tanaka ◽  
Yukio Sakabe

2000 ◽  
Vol 108 (1259) ◽  
pp. 623-626
Author(s):  
Koji ISHIZAWA ◽  
Yutaka YOSHIDA ◽  
Masato HASEGAWA ◽  
Morihiro IWATA ◽  
Katsuya YAMAGIWA ◽  
...  

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