Impurity ion implantation into silicon single crystals: efficiency and radiation damage

1995 ◽  
Vol 165 (3) ◽  
pp. 347-358 ◽  
Author(s):  
V.S. Vavilov ◽  
Aleksei R. Chelyadinskii
1983 ◽  
Vol 27 ◽  
Author(s):  
J.C. Soares ◽  
A.A. Melo ◽  
M.F. DA Silva ◽  
E.J. Alves ◽  
K. Freitag ◽  
...  

ABSTRACTLow and high dose hafnium imolanted beryllium samoles have been prepared at room temperature by ion implantation of beryllium commercial foils and single crystals. These samples have been studied before and after annealing with the time differential perturbed angular correlation method (TDPAC) and with Rutherford backscattering and channeling techniques. A new metastable system has been discovered in TDPAC-measurements in a low dose hafnium implanted beryllium foil annealed at 500°C. Channeling measurements show that the hafnium atoms after annealing, are in the regular tetrahedral sites but dislocated from the previous position occupied after implantation. The formation of this system is connected with the redistribution of oxygen in a thin layer under the surface. This effect does not take place precisely at the same temperature in foils and in single crystals.


2011 ◽  
Vol 257 (17) ◽  
pp. 7573-7578 ◽  
Author(s):  
K. Sangeetha ◽  
R. Ramesh Babu ◽  
P. Kumar ◽  
G. Bhagvannarayana ◽  
K. Ramamurthi

1985 ◽  
Vol 15 (6) ◽  
pp. 1237-1247 ◽  
Author(s):  
A Audouard ◽  
A Benyagoub ◽  
L Thome ◽  
J Chaumont

1992 ◽  
Vol 262 ◽  
Author(s):  
D. Y. C. Lie ◽  
A. Vantomme ◽  
F. Eisen ◽  
M. -A. Nicolet ◽  
V. Arbet-Engels ◽  
...  

ABSTRACTWe have studied the damage and strain produced in Ge (100) single crystals by implantation of various doses of 300 keV 28Si ions at room temperature. The analyzing tools were x-ray double-crystal diffractometry, and MeV 4He channeling spectrometry. The damage induced by implantation produces positive strain in Ge (100). The maximum perpendicular strain and maximum defect concentration rise nonlinearly with increasing dose. These quantities are linearly related with a dose-independent coefficient of ∼ 0.013 for Ge (100) single crystals implanted at room temperature. The results are compared with those available for Si (100) self-implantation. We have also monitored the strain and defects generated in pseudomorphic Ge0.1Si0.9/Si (100) films induced by room temperature 28Si ion implantation. It is found that the relationship between the strain and defect concentration induced by ion implantation is no longer a simple linear one.


Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 132-135
Author(s):  
J.X. Xu ◽  
X.H. Xiao ◽  
F. Ren ◽  
X.D. Zhou ◽  
G.X. Cai ◽  
...  

2009 ◽  
Vol 45 (6) ◽  
pp. 606-610 ◽  
Author(s):  
A. N. Georgobiani ◽  
B. N. Levonovich

Author(s):  
Volodymyr D. Popovych ◽  
Roman Böttger ◽  
Rene Heller ◽  
Shengqiang Zhou ◽  
Mariusz Bester ◽  
...  

1976 ◽  
Vol 15 (8) ◽  
pp. 1513-1521 ◽  
Author(s):  
Sadao Adachi ◽  
Yoshio Machi

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