scholarly journals Instability and Drift Phenomena in Switching RF-MEMS Microsystems

Actuators ◽  
2019 ◽  
Vol 8 (1) ◽  
pp. 15
Author(s):  
Viviana Mulloni
Keyword(s):  
Temperature Variation ◽  
Rf Mems ◽  
Charge Trapping ◽  
Mechanical Deformation ◽  
Mems Switches ◽  
Mechanical Structure ◽  
Comprehensive View ◽  
Contact Wear ◽  
Fabrication Tolerances ◽  
Dielectric Charge

MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices.

Investigation methods and approaches for alleviating charge trapping phenomena in ohmic RF-MEMS switches submitted to cycling test

2011 ◽  
Vol 51 (9-11) ◽  
pp. 1887-1891 ◽  
Author(s):  
A. Massenz ◽  
M. Barbato ◽  
V. Giliberto ◽  
B. Margesin ◽  
S. Colpo ◽  
...  
Keyword(s):  
Rf Mems ◽  
Charge Trapping ◽  
Mems Switches ◽  
Cycling Test ◽  
Rf Mems Switches ◽  
Investigation Methods

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

CMOS Compatible RF MEMS Switches with Serpentine Springs

2019 ◽  
Vol 18 (1) ◽  
pp. 9-14
Author(s):  
Xiao L. Evans ◽  
H.S. Gamble ◽  
P.T. Baine ◽  
S.J.N. Mitchell ◽  
J. Montgomery ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Cmos Compatible

scholarly journals Recent Developments of Reflectarray Antennas for Reconfigurable Beams Using Surface-Mounted RF-MEMS

2012 ◽  
Vol 2012 ◽  
pp. 1-12 ◽  
Author(s):  
Eduardo Carrasco ◽  
Mariano Barba ◽  
Manuel Arrebola ◽  
Jose A. Encinar
Keyword(s):  
Phase Shifter ◽  
Rf Mems ◽  
Low Cost ◽  
Phase Control ◽  
Electronic Control ◽  
Delay Lines ◽  
Mems Switches ◽  
Manufacturing Complexity ◽  
Recent Developments ◽  
Control Devices

Some of the most recent developments in reconfigurable reflectarrays using surface-mounted RF-MEMS, which have been developed at the Universidad Politécnica de Madrid, are summarized in this paper. The results include reconfigurable elements based on patches aperture-coupled to delay lines in two configurations: single elements and gathered elements which form subarrays with common phase control. The former include traditional aperture-coupled elements and a novel wideband reflectarray element which has been designed using two stacked patches. The latter are proposed as a low cost solution for reducing the number of electronic control devices as well as the manufacturing complexity of large reflectarrays. The main advantages and drawbacks of the grouping are evaluated in both pencil and shaped-beam antennas. In all the cases, the effects of the MEMS switches and their assembly circuitry are evaluated when they are used in a 2-bit phase shifter which can be extended to more bits, demonstrating that the proposed elements can be used efficiently in reconfigurable-beam reflectarrays.

scholarly journals Lifetime characterization of capacitive power RF MEMS switches

2006 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Yves Mancuso
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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