Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries

Along with the soaring demands for all-solid-state thin-film lithium-ion batteries, the problem of their energy density rise becomes very acute. The solution to this problem can be found in development of 3D batteries. The present work deals with the development of a technology for a 3D solid-state lithium-ion battery (3D SSLIB) manufacturing by plasma-chemical etching and magnetron sputtering technique. The results on testing of experimental samples of 3D SSLIB are presented. It was found that submicron-scale steps appearing on the surface of a 3D structure formed on Si substrate by the Bosch process radically change the crystal structure of the upper functional layers. Such changes can lead to disruption of the layers’ continuity, especially that of the down conductors. It is shown that surface polishing by liquid etching of the SiO2 layer and silicon reoxidation leads to surface smoothing, the replacement of the dendrite structure of functional layers by a block structure, and a significant improvement in the capacitive characteristics of the battery.

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Lithium-Salt-Rich PEO/Li0.3La0.557TiO3 Interpenetrating Composite Electrolyte with Three-Dimensional Ceramic Nano-Backbone for All-Solid-State Lithium-Ion Batteries

ACS Applied Materials & Interfaces ◽

10.1021/acsami.8b06658 ◽

2018 ◽

Vol 10 (29) ◽

pp. 24791-24798 ◽

Cited By ~ 73

Author(s):

Xinzhi Wang ◽

Yibo Zhang ◽

Xue Zhang ◽

Ting Liu ◽

Yuan-Hua Lin ◽

...

Keyword(s):

Solid State ◽

Lithium Ion Batteries ◽

Lithium Salt ◽

Three Dimensional ◽

Lithium Ion ◽

Composite Electrolyte

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Lithium-based vertically aligned nanocomposites for three-dimensional solid-state batteries

MRS Bulletin ◽

10.1557/s43577-021-00026-2 ◽

2021 ◽

Vol 46 (2) ◽

pp. 152-158 ◽

Cited By ~ 1

Author(s):

Daniel M. Cunha ◽

Mark Huijben

Keyword(s):

Solid State ◽

Matrix Material ◽

Three Dimensional ◽

Lithium Ion ◽

Current Collector ◽

The Matrix ◽

Solid State Batteries ◽

Vertically Aligned ◽

Two Phases ◽

3D Solid

AbstractPlanar two-dimensional (2D) solid-state lithium-ion batteries exhibit an undesirable energy versus power balance, which can be dramatically improved by the application of three-dimensional (3D) geometries. Current ceramics-based nanocomposites exhibit limited control of the distribution and orientation of the nanoparticles within the matrix material. However, the tailoring of functionalities by the strong coupling between the two phases and their interfaces, present in epitaxial 3D vertically aligned nanocomposites (VANs), show promising advantages over the conventional 2D planar multilayers. Although a range of epitaxial VANs have been studied in the last decade, lithium-based VANs toward battery applications have remained mostly unexplored. Interestingly, two recent studies by Qi et al. and Cunha et al. demonstrate the unique potential of lithium-based VANs toward the realization of 3D solid-state batteries with enhanced energy storage performance. In this article, we will discuss these promising results as an enhanced current collector within the cathode or as an integrated solid-state cathode-electrolyte composite. Furthermore, we will describe different design configurations that can be applied to realize self-assembled VAN-based complete 3D battery devices.

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Three-Dimensional Modeling of All-Solid-State Lithium-Ion Batteries Using Synchrotron Transmission X-ray Microscopy Tomography

Journal of The Electrochemical Society ◽

10.1149/1945-7111/ab9380 ◽

2020 ◽

Vol 167 (10) ◽

pp. 100558

Author(s):

Hamed Fathiannasab ◽

Ali Ghorbani Kashkooli ◽

Tianyi Li ◽

Likun Zhu ◽

Zhongwei Chen

Keyword(s):

Solid State ◽

Lithium Ion Batteries ◽

Three Dimensional ◽

Lithium Ion ◽

X Ray ◽

Three Dimensional Modeling ◽

Dimensional Modeling

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Three-dimensional hierarchical pompon-like Co3O4 porous spheres for high-performance lithium-ion batteries

Journal of Materials Chemistry A ◽

10.1039/c4ta02012j ◽

2014 ◽

Vol 2 (34) ◽

pp. 13801-13804 ◽

Cited By ~ 62

Author(s):

Wenjun Hao ◽

Shimou Chen ◽

Yingjun Cai ◽

Lan Zhang ◽

Zengxi Li ◽

...

Keyword(s):

Lithium Ion Batteries ◽

Lithium Ion Battery ◽

Hydrothermal Method ◽

Self Assembly ◽

High Performance ◽

3D Structure ◽

Three Dimensional ◽

Lithium Ion ◽

Simple Hydrothermal Method ◽

Porous Spheres

3D hierarchical pompon-like Co3O4 porous spheres were produced by a simple hydrothermal method. The 3D structure is composed of many nanowires which gathered as a ring in the centre and fanned out via a special self-assembly fashion, resulting in good lithium ion battery performance.

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3D Solid State Lithium-Ion Batteries

ECS Meeting Abstracts ◽

10.1149/ma2011-02/17/1360 ◽

2011 ◽

Keyword(s):

Solid State ◽

Lithium Ion Batteries ◽

Lithium Ion ◽

3D Solid

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Study on the Bionic Preparation and Properties of TiO2 as Three-Dimensional Anode Materials for Lithium-Ion Batteries

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.875-877.1507 ◽

2014 ◽

Vol 875-877 ◽

pp. 1507-1510

Author(s):

Yi Ping Tang ◽

Liang Hong ◽

Yuan Chao Jin ◽

Huan Le Zhang ◽

Guo Qu Zheng

Keyword(s):

Electrochemical Performance ◽

Lithium Ion Batteries ◽

Anode Materials ◽

3D Structure ◽

Three Dimensional ◽

Lithium Ion ◽

The Novel ◽

X Ray Diffraction ◽

X Ray ◽

Butterfly Wings

In this paper, a novel bionic preparation of anode materials for lithium-ion batteries was reported. Butterfly wings were used as a template to prepare three-dimensional (3D) TiO2 anode materials. The final product of TiO2 anode materials maintained the 3D structure of butterfly wings perfectly. The morphology and crystal structure were studied by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM). The electrochemical performance was evaluated by galvanostatic chargedischarge tests. The results showed that the novel 3D porous structure is benefit to the high electrochemical performance

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Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry

ACS Nano ◽

10.1021/acsnano.7b08751 ◽

2018 ◽

Vol 12 (5) ◽

pp. 4286-4294 ◽

Cited By ~ 29

Author(s):

Alexander Pearse ◽

Thomas Schmitt ◽

Emily Sahadeo ◽

David M. Stewart ◽

Alexander Kozen ◽

...

Keyword(s):

Solid State ◽

Lithium Ion Batteries ◽

Vapor Phase ◽

Three Dimensional ◽

Lithium Ion ◽

Phase Chemistry

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A Three-Dimensional Electrospun Li6.4La3Zr1.4Ta0.6O12–Poly (Vinylidene Fluoride-Hexafluoropropylene) Gel Polymer Electrolyte for Rechargeable Solid-State Lithium Ion Batteries

Frontiers in Chemistry ◽

10.3389/fchem.2021.751476 ◽

2021 ◽

Vol 9 ◽

Author(s):

Donghuang Wang ◽

Dan Cai ◽

Yu Zhong ◽

Zhao Jiang ◽

Shengzhao Zhang ◽

...

Keyword(s):

Solid State ◽

Lithium Ion Batteries ◽

Polymer Electrolyte ◽

Vinylidene Fluoride ◽

Gel Polymer Electrolyte ◽

Three Dimensional ◽

Lithium Ion ◽

Porous Polymer ◽

Electrospinning Technique ◽

Electrolyte Uptake

Developing high-quality solid-state electrolytes is important for producing next-generation safe and stable solid-state lithium-ion batteries. Herein, a three-dimensional highly porous polymer electrolyte based on poly (vinylidenefluoride-hexafluoropropylene) (PVDF-HFP) with Li6.4La3Zr1.4Ta0.6O12 (LLZTO) nanoparticle fillers (PVDF-HFP-LLZTO) is prepared using the electrospinning technique. The PVDF-HFP-LLZTO gel polymer electrolyte possesses a high ionic conductivity of 9.44 × 10–4 S cm−1 and a Li-ion transference number of 0.66, which can be ascribed that the 3D hierarchical nanostructure with abundant porosity promotes the liquid electrolyte uptake and wetting, and LLZTO nanoparticles fillers decrease the crystallinity of PVDF-HFP. Thus, the solid-state lithium battery with LiFePO4 cathode, PVDF-HFP-LLZTO electrolyte, and Li metal anode exhibits enhanced electrochemical performance with improved cycling stability.

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