Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer

Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a protecting shell, usually made from titanium (Ti), to fulfill biocompatibility and hermeticity requirements. To allow acoustic sound to be transferred between the surroundings and the hermetically sealed MEMS transducer, a compliant diaphragm element needs to be integrated into the protecting enclosure. In this paper, we present a novel fabrication technology for clamped micron-thick Ti diaphragms that can be applied on arbitrary 3D substrate geometry and hence directly integrated into the packaging structure. Stiffness measurements on various diaphragm samples illustrate that the technology enables a significant reduction of residual stress in the diaphragm developed during its deposition on a polymer sacrificial material.

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Silicon Oxynitride Membrane for Chemical Sensor Application

MRS Proceedings ◽

10.1557/proc-518-99 ◽

1998 ◽

Vol 518 ◽

Cited By ~ 2

Author(s):

S. Astle ◽

E. Scheid ◽

A.M. Gue ◽

J.P. Guillemet ◽

L. Lescouzeres

Keyword(s):

Residual Stress ◽

Power Consumption ◽

Mechanical Strength ◽

Gas Sensors ◽

Tin Oxide ◽

Chemical Sensor ◽

Young Modulus ◽

Silicon Oxynitride ◽

Low Power Consumption ◽

New Sensors

AbstractTin oxide gas sensor can detect various gases by using the conductivity changes due to adsorption and desorption processes of gaseous molecules on its surface. The reduction of the power consumption especially for batteries back-up operation, is one of the challenge for SnO2 gas sensors. We propose a new solution using a silicon oxynitride membrane (SiOxNy) to reach this objective. Thin films of SiOxNy with different compositions have been studied. Their composition, residual stress, Young modulus and mechanical strength have been evaluated. As a result, we propose an optimized silicon oxynitride membrane with a low residual stress (-50 MPa), giving above 95% fabrication yield and low power consumption (65 mW / 450°C). A new sensors generation has been successfully fabricated and its mechanical strength and thermal performances have been evaluated. Moreover, an equation is derived, which describes the variation of the Young modulus as a function of the silicon oxynitride composition.

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MEMS Scanning Mirrors for Optical Coherence Tomography

Photonics ◽

10.3390/photonics8010006 ◽

2020 ◽

Vol 8 (1) ◽

pp. 6

Author(s):

Christophe Gorecki ◽

Sylwester Bargiel

Keyword(s):

Optical Coherence Tomography ◽

Power Consumption ◽

Low Power ◽

Low Power Consumption ◽

Optical Coherence ◽

Micro Electro Mechanical Systems ◽

Actuation Mechanism ◽

Electrothermal Actuation ◽

Scan Speed

This contribution presents an overview of advances in scanning micromirrors based on MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT (Optical Coherence Tomography). The use of MEMS scanners for miniaturized OCT probes requires appropriate optical architectures. Their design involves a suitable actuation mechanism and an adapted imaging scheme in terms of achievable scan range, scan speed, low power consumption, and acceptable size of the OCT probe. The electrostatic, electromagnetic, and electrothermal actuation techniques are discussed here as well as the requirements that drive the design and fabrication of functional OCT probes. Each actuation mechanism is illustrated by examples of miniature OCT probes demonstrating the effectiveness of in vivo bioimaging. Finally, the design issues are discussed to permit users to select an OCT scanner that is adapted to their specific imaging needs.

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A Phase Change Memory Device Fabrication Technology Using Si2Sb2Te6 for Low Power Consumption Application

ECS Transactions ◽

10.1149/1.3567714 ◽

2019 ◽

Vol 34 (1) ◽

pp. 1053-1057 ◽

Cited By ~ 1

Author(s):

Ying Li ◽

Xudong Wan ◽

Zhitang Song ◽

Joseph Xie ◽

Bomy Chenc ◽

...

Keyword(s):

Power Consumption ◽

Low Power ◽

Phase Change ◽

Phase Change Memory ◽

Memory Device ◽

Device Fabrication ◽

Low Power Consumption ◽

Fabrication Technology ◽

Change Memory

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A Large-Angle and Large-Mirror Microscanner Based on Thermal Actuators

10.1115/imece2001/mems-23848 ◽

2001 ◽

Author(s):

Ching-Chen Tu ◽

Cheng-Hsien Liu ◽

Chen-Hsun Du ◽

Jiunn-jye Tsaur ◽

Chengkuo Lee

Keyword(s):

Thin Film ◽

Residual Stress ◽

Power Consumption ◽

Low Power ◽

Self Assembly ◽

Large Angle ◽

Low Power Consumption ◽

Scanning Angle ◽

Thermal Actuators ◽

Out Of Plane

Abstract In this paper, we present a large-scanning-angle and large-mirror microscanner actuated by the thermal actuators. The thermal actuators are based on bimorph effect and consist of three thin film layers, Polyimide, Au, and SiO2. The large mirror is released rapidly by using poly-pad combined with surface micromachining and bulk micromachining. The actuator has the adventure of low power consumption from our design. Furthermore, our microscanner can achieve the purposes of self-assembly and out-of-plane by residual stress after curing processes.

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Compositional Tuning of Negative Differential Resistance in Bulk Silver Iodide Memristor

New Journal of Chemistry ◽

10.1039/d0nj05427e ◽

2020 ◽

Author(s):

SMITA GAJANAN NAIK ◽

Mohammad Hussain Kasim Rabinal

Keyword(s):

Power Consumption ◽

Negative Differential Resistance ◽

Silver Iodide ◽

Differential Resistance ◽

Fast Response ◽

Low Power Consumption ◽

Switching Effect ◽

Memory Switching ◽

Bulk Silver ◽

Emerging Memory

Electrical memory switching effect has received a great interest to develop emerging memory technology such as memristors. The high density, fast response, multi-bit storage and low power consumption are their...

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Optimal design of a high homogeneous and small-size shim coil for atomic spin gyroscope based on 0-1 linear programming

International Journal of Applied Electromagnetics and Mechanics ◽

10.3233/jae-209319 ◽

2020 ◽

Vol 64 (1-4) ◽

pp. 165-172

Author(s):

Dongge Deng ◽

Mingzhi Zhu ◽

Qiang Shu ◽

Baoxu Wang ◽

Fei Yang

Keyword(s):

Linear Programming ◽

Power Consumption ◽

Low Power ◽

Optimization Design ◽

Structural Parameters ◽

Axial Position ◽

Low Power Consumption ◽

Optimal Method ◽

Atomic Spin ◽

Shim Coil

It is necessary to develop a high homogeneous, low power consumption, high frequency and small-size shim coil for high precision and low-cost atomic spin gyroscope (ASG). To provide the shim coil, a multi-objective optimization design method is proposed. All structural parameters including the wire diameter are optimized. In addition to the homogeneity, the size of optimized coil, especially the axial position and winding number, is restricted to develop the small-size shim coil with low power consumption. The 0-1 linear programming is adopted in the optimal model to conveniently describe winding distributions. The branch and bound algorithm is used to solve this model. Theoretical optimization results show that the homogeneity of the optimized shim coil is several orders of magnitudes better than the same-size solenoid. A simulation experiment is also conducted. Experimental results show that optimization results are verified, and power consumption of the optimized coil is about half of the solenoid when providing the same uniform magnetic field. This indicates that the proposed optimal method is feasible to develop shim coil for ASG.

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