scholarly journals Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

Sensors ◽  
2015 ◽  
Vol 15 (12) ◽  
pp. 30293-30310 ◽  
Author(s):  
Jing Zhang ◽  
Yan Su ◽  
Qin Shi ◽  
An-Ping Qiu
Keyword(s):  
High Sensitivity ◽  
Resonant Accelerometer

scholarly journals A Small and High Sensitivity Resonant Accelerometer

2009 ◽  
Vol 1 (1) ◽  
pp. 536-539 ◽  
Author(s):  
D. Pinto ◽  
D. Mercier ◽  
C. Kharrat ◽  
E. Colinet ◽  
V. Nguyen ◽  
...  
Keyword(s):  
High Sensitivity ◽  
Resonant Accelerometer

scholarly journals A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams

Sensors ◽  
2022 ◽  
Vol 22 (2) ◽  
pp. 641
Author(s):  
Yang Xiao ◽  
Feng Hu ◽  
Yuchen Zhang ◽  
Jiaxing Zheng ◽  
Shiqiao Qin
Keyword(s):  
High Precision ◽  
Horizontal Plane ◽  
Linear Acceleration ◽  
High Sensitivity ◽  
Differential Sensitivity ◽  
Size Change ◽  
Force Transfer ◽  
Simulation Results ◽  
Transfer Structure ◽  
Resonant Accelerometer

In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and accurate measurement of the direction and magnitude of acceleration on the horizontal plane. The simulation results show that the critical buckling acceleration is 460 g, the linear range is 0–89 g, while the differential sensitivity is 50,919 Hz/g, which is generally higher than that of the resonant accelerometer reported previously. Thus, the accelerometer belongs to the ultra-high sensitivity accelerometer. In addition, increasing the length and tension of graphene can obviously increase the critical linear acceleration and critical buckling acceleration with the decreasing sensitivity of the accelerometer. Additionally, the size change of the force transfer structure can significantly affect the detection performance. As the etching accuracy reaches the order of 100 nm, the critical buckling acceleration can reach up to 5 × 104 g, with a sensitivity of 250 Hz/g. To sum up, a feasible design of a biaxial graphene resonant accelerometer is proposed in this work, which provides a theoretical reference for the fabrication of a graphene accelerometer with high precision and stability.

Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity

2011 ◽  
Vol 6 (7) ◽  
pp. 519 ◽  
Author(s):  
Yanlong Shang ◽  
Junbo Wang ◽  
Sheng Tu ◽  
Lei Liu ◽  
Deyong Chen
Keyword(s):  
High Sensitivity ◽  
Silicon On Insulator ◽  
Resonant Accelerometer

A High-Sensitivity Micromechanical Silicon Resonant Accelerometer without Mechanical Coupling

2015 ◽  
Vol 741 ◽  
pp. 333-339
Author(s):  
Qi Zhang ◽  
Si Yu Zhou ◽  
Zi Yan Ju ◽  
Li Bin Huang
Keyword(s):  
High Sensitivity ◽  
Digital Signal ◽  
Mechanical Sensitivity ◽  
Mechanical Coupling ◽  
Accuracy Measurement ◽  
Blind Area ◽  
Micromechanical Accelerometer ◽  
Resonant Accelerometer ◽  
High Accuracy Measurement

Micromechanical silicon resonant accelerometer can easily realize high-accuracy measurement by taking the digital signal as the output. Thus, this accelerometer has become popular in the field of micromechanical accelerometer. One-mass accelerometer with differential structure has blind area in measuring, and to overcome this deficiency, a new structure without mechanical coupling is designed. This new structure can cut off coupling channels by isolating the mass, and vibration decoupling between two resonators can be achieved structurally. Furthermore, the scale factor of the designed accelerometer is as high as 295 Hz/g. This finding indicates that this accelerometer has high mechanical sensitivity, which reduces the difficulty of follow-up testing.

A high sensitivity uniaxial resonant accelerometer

2010 ◽  
Author(s):  
Claudia Comi ◽  
Alberto Corigliano ◽  
Giacomo Langfelder ◽  
Antonio Longoni ◽  
Alessandro Tocchio ◽  
...  
Keyword(s):  
High Sensitivity ◽  
Resonant Accelerometer

scholarly journals Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

Sensors ◽  
2020 ◽  
Vol 20 (24) ◽  
pp. 7207
Author(s):  
Yan Li ◽  
Linke Song ◽  
Shuai Liang ◽  
Yifeng Xiao ◽  
Fuling Yang
Keyword(s):  
Uncertainty Analysis ◽  
Nonlinear Vibration ◽  
Tracking Error ◽  
High Sensitivity ◽  
Beam Width ◽  
Nonlinear Frequency ◽  
Beam Length ◽  
Concentrated Mass ◽  
Resonant Beam ◽  
Resonant Accelerometer

This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant accelerometer is established. Then, the nonlinear and nonlinear stiffness coefficients are calculated and analyzed with the Galérkin principle. The linear natural frequency, tracking error, and nonlinear frequency offset are obtained by multi-scale method. Finally, to further analyze the nonlinear vibration, a sample-based stochastic model is established, and the uncertainty analysis method is applied. It is concluded from the results that nonlinear vibration can be reduced by reducing the resonant beam length and increasing the resonant beam width and thickness. In addition, the resonant beam length and thickness have more significant effects, while the resonant beam width and the single concentrated mass of comb fingers have little effect, which are verified by experiments. The results of this research have proved that uncertainty analysis is an effective approach in nonlinear vibration analysis and instructional in practical resonant accelerometer design.

scholarly journals A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor

Micromachines ◽  
2019 ◽  
Vol 10 (9) ◽  
pp. 571 ◽  
Author(s):  
Jian Cui ◽  
Haibing Yang ◽  
Dong Li ◽  
Ziyang Song ◽  
Qiancheng Zhao
Keyword(s):  
Thermal Stress ◽  
Thermal Sensitivity ◽  
High Sensitivity ◽  
Measurement Range ◽  
Dominant Factor ◽  
Stress Effect ◽  
Temperature Drift ◽  
Significant Performance ◽  
The Stability ◽  
Resonant Accelerometer

Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability. Theoretical analysis demonstrates that temperature-induced stress is the dominant factor that determines the bias temperature drift of the custom-designed SRA. To solve this issue, this paper presents an SRA embedded in an isolation frame with stress insensitive anchor that prevents the resonant beams suffering from the thermal stress along the sense axis and thus improving the bias stability. Moreover, a high sensitivity device is achieved by integrating the vibrating beams with the comb fingers without conventional additional mass design. The experimental results show that the nominal resonant frequency of the SRA is around 93 kHz with the sensitivity and nonlinearity of 223.7 Hz/g and 5.1‰. The thermal sensitivities of the two resonant beams are −27.6 ppm/°C and −28.8 ppm/°C, respectively, which can be considered as the results owing to temperature change of the Young’s modulus without the thermal stress effect. The bias thermal sensitivity and the stability (1σ) after compensation are tested to be approximately 0.7 mg/°C and 1 mg over the temperature range from −40 °C to 60 °C with ±80 g measurement range.

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