LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME
Keyword(s):
The possibilities of improving the quality of the topological pattern in the exposure of thick-film photoresists due to uniform irradiation with ultraviolet light-emitting diodes are investigated. The results of an experimental study of the developed LED ultraviolet photolithographic irradiator with a controlled exposure time are presented.
2019 ◽
Vol 15
(4)
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pp. 572-576
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2016 ◽
Vol 6
(10)
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pp. 1488-1492
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2016 ◽
Vol 52
(8)
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pp. 1-6
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2020 ◽
Vol 13
(10)
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pp. 102005
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2017 ◽
Vol 9
(5)
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pp. 05031-1-05031-5
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2010 ◽
Vol 4
(1-2)
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pp. 49-51
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