scholarly journals Low-temperature annealing behavior of defects in Mg-ion-implanted GaN studied using MOS diodes and monoenergetic positron beam

2020 ◽  
Vol 60 (1) ◽  
pp. 016502
Author(s):  
Masamichi Akazawa ◽  
Ryo Kamoshida ◽  
Shunta Murai ◽  
Tetsu Kachi ◽  
Akira Uedono
Keyword(s):  
Low Temperature ◽  
Positron Beam ◽  
Annealing Behavior ◽  
Low Temperature Annealing ◽  
Ion Implanted

Low-temperature annealing of heavily ion-implanted layer

1990 ◽  
Vol 73 (6) ◽  
pp. 86-91
Author(s):  
Tadahiro Ohmi ◽  
Yoshio Ishihara ◽  
Tadashi Shibata ◽  
Akira Okita
Keyword(s):  
Low Temperature ◽  
Low Temperature Annealing ◽  
Ion Implanted

Germanium substrate loss during low temperature annealing and its influence on ion-implanted phosphorous dose loss

2008 ◽  
Vol 93 (10) ◽  
pp. 101910 ◽  
Author(s):  
N. Ioannou ◽  
D. Skarlatos ◽  
C. Tsamis ◽  
C. A. Krontiras ◽  
S. N. Georga ◽  
...  
Keyword(s):  
Low Temperature ◽  
Low Temperature Annealing ◽  
Germanium Substrate ◽  
Ion Implanted

Low-temperature annealing behavior of iron-related deep levels in n-type silicon wafers

2016 ◽  
Vol 55 (2) ◽  
pp. 021301 ◽  
Author(s):  
Ayumi Onaka-Masada ◽  
Takeshi Kadono ◽  
Noritomo Mitsugi ◽  
Kazunari Kurita
Keyword(s):  
Low Temperature ◽  
Deep Levels ◽  
Silicon Wafers ◽  
Annealing Behavior ◽  
Type Silicon ◽  
Low Temperature Annealing

Low‐temperature annealing behavior of GaAs implanted with Be

1979 ◽  
Vol 35 (2) ◽  
pp. 178-180 ◽  
Author(s):  
C. Lawrence Anderson ◽  
H. L. Dunlap
Keyword(s):  
Low Temperature ◽  
Annealing Behavior ◽  
Low Temperature Annealing

Low‐temperature annealing of ion‐implanted KNbO3waveguides for second‐harmonic generation

1995 ◽  
Vol 77 (12) ◽  
pp. 6114-6120 ◽  
Author(s):  
Tomas Pliska ◽  
Dieter H. Jundt ◽  
Daniel Fluck ◽  
Peter Günter ◽  
Daniel Rytz ◽  
...  
Keyword(s):  
Low Temperature ◽  
Second Harmonic Generation ◽  
Harmonic Generation ◽  
Second Harmonic ◽  
Low Temperature Annealing ◽  
Ion Implanted

Low temperature annealing of ion-implanted KNbO3 channel waveguides

1994 ◽  
Vol 30 (7) ◽  
pp. 562-563 ◽  
Author(s):  
T. Pliska ◽  
P. Günter ◽  
Ch. Buchal ◽  
D. Fluck ◽  
D.H. Jundt ◽  
...  
Keyword(s):  
Low Temperature ◽  
Low Temperature Annealing ◽  
Channel Waveguides ◽  
Ion Implanted
Sign in / Sign up

Export Citation Format

Share Document