Spurious free thickness shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs
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Abstract This paper describes design and fabrication of sprious-free thickness shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cutoff edges with crystal LN X-plane serve as ideal reflectors for the piston mode operation, and complete suppression is possible by adding the standard piston mode design to the other edges normal to the X-axis. Following to this conjecture, the traditional piston mode structure is designed by the traditional two-dimensional finite element method, and the TSBAR is fabricated following to the design. The experiment showed complete suppression of the transverse mode resonances, and the conjecture was verified.
2017 ◽
Vol 25
(5)
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pp. 395-406
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1998 ◽
Vol 17
(3)
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pp. 157-166
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2020 ◽
Vol 917
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pp. 012028
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1981 ◽
Vol 50
(1)
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pp. 15-26
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