Vapor deposition routes to conformal polymer thin films
2017 ◽
Vol 8
◽
pp. 723-735
◽
Keyword(s):
Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.
2016 ◽
Vol 7
(1)
◽
pp. 373-393
◽
Keyword(s):
2015 ◽
Vol 33
(3)
◽
pp. 031504
◽
2005 ◽
Vol 23
(4)
◽
pp. 875-879
◽
2018 ◽
Vol 10
(32)
◽
pp. 27063-27073
◽
Keyword(s):
2017 ◽
Vol 302
(12)
◽
pp. 1700315
◽
Keyword(s):