Polymer Thin Films and Surface Modification by Chemical Vapor Deposition: Recent Progress

2016 ◽  
Vol 7 (1) ◽  
pp. 373-393 ◽  
Author(s):  
Nan Chen ◽  
Do Han Kim ◽  
Peter Kovacik ◽  
Hossein Sojoudi ◽  
Minghui Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Recent Progress ◽  
Polymer Thin Films ◽  
Chemical Vapor

scholarly journals Vapor deposition routes to conformal polymer thin films

2017 ◽  
Vol 8 ◽  
pp. 723-735 ◽  
Author(s):  
Priya Moni ◽  
Ahmed Al-Obeidi ◽  
Karen K Gleason
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Sample Preparation ◽  
Vapor Phase ◽  
Vapor Deposition ◽  
Imaging Techniques ◽  
Polymer Thin Films ◽  
Chemical Vapor ◽  
Short Review ◽  
Deposition Sample

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.

Initiated-Chemical Vapor Deposition of Polymer Thin Films: Unexpected Two-Regime Growth

2017 ◽  
Vol 302 (12) ◽  
pp. 1700315 ◽  
Author(s):  
Laetitia Bonnet ◽  
Bruce Altemus ◽  
Riccardo Scarazzini ◽  
Marc Veillerot ◽  
Franck D'Agosto ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Polymer Thin Films ◽  
Chemical Vapor ◽  
Initiated Chemical Vapor Deposition
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