Growth of fluorocarbon polymer thin films with high CF2 fractions and low dangling bond concentrations by thermal chemical vapor deposition

1996 ◽  
Vol 68 (20) ◽  
pp. 2810-2812 ◽  
Author(s):  
Scott J. Limb ◽  
Catherine B. Labelle ◽  
Karen K. Gleason ◽  
David J. Edell ◽  
Edward F. Gleason
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Polymer Thin Films ◽  
Chemical Vapor ◽  
Dangling Bond ◽  
Thermal Chemical Vapor Deposition ◽  
Fluorocarbon Polymer

scholarly journals Synthesis of diamond thin films by atmospheric-pressure thermal chemical vapor deposition and their characterization.

Shinku ◽  
1987 ◽  
Vol 30 (2) ◽  
pp. 60-68
Author(s):  
Yoichi HIROSE ◽  
Yuki TERASAWA ◽  
Kazuya IWASAKI ◽  
Katumi TAKAHASHI ◽  
Kazuo TEZUKA
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition ◽  
Diamond Thin Films

scholarly journals Vapor deposition routes to conformal polymer thin films

2017 ◽  
Vol 8 ◽  
pp. 723-735 ◽  
Author(s):  
Priya Moni ◽  
Ahmed Al-Obeidi ◽  
Karen K Gleason
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Sample Preparation ◽  
Vapor Phase ◽  
Vapor Deposition ◽  
Imaging Techniques ◽  
Polymer Thin Films ◽  
Chemical Vapor ◽  
Short Review ◽  
Deposition Sample

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.

Sign in / Sign up

Export Citation Format

Share Document