Proton beam writing with scanning proton microprobe

2012 ◽  
Vol 24 (7) ◽  
pp. 1603-1607
Author(s):  
雷前涛 Lei Qiantao ◽  
刘江峰 Liu Jiangfeng ◽  
包良满 Bao Liangman ◽  
张仲建 Zhang Zhongjian ◽  
余本海 Yu Benhai ◽  
...  
Keyword(s):  
Proton Beam ◽  
Proton Microprobe ◽  
Proton Beam Writing ◽  
Scanning Proton Microprobe

Development of ion sources: Towards high brightness for proton beam writing applications

2015 ◽  
Vol 348 ◽  
pp. 23-28 ◽  
Author(s):  
Nannan Liu ◽  
P. Santhana Raman ◽  
Xinxin Xu ◽  
Huei Ming Tan ◽  
Anjam Khursheed ◽  
...  
Keyword(s):  
Proton Beam ◽  
Ion Sources ◽  
High Brightness ◽  
Proton Beam Writing

Fabrication of micro-optical components in polymer using proton beam writing

2004 ◽  
Author(s):  
Andrew A. Bettiol ◽  
Kambiz Ansari ◽  
Tze Chien Sum ◽  
Jeroen A. van Kan ◽  
Frank Watt
Keyword(s):  
Proton Beam ◽  
Optical Components ◽  
Proton Beam Writing
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