scholarly journals Near-field Optical Lithography for High-aspect-ratio Patterning by Using Electric Field Enhanced Postexposure Baking

2010 ◽  
Vol 21 (6) ◽  
pp. 241-246
Author(s):  
Seok Kim ◽  
Jin-Hee Jang ◽  
Yong-Woo Kim ◽  
Ho-Won Jung ◽  
Jae-Won Hahn
2021 ◽  
Author(s):  
Zhitian Shi ◽  
Konstantins Jefimovs ◽  
Antonino La Magna ◽  
Marco Stampanoni ◽  
Lucia Romano

Nanomaterials ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 1051 ◽  
Author(s):  
Raitis Sondors ◽  
Jelena Kosmaca ◽  
Gunta Kunakova ◽  
Liga Jasulaneca ◽  
Matiss Martins Ramma ◽  
...  

Size distribution, Young’s moduli and electrical resistivity are investigated for CuO nanowires synthesized by different thermal oxidation methods. Oxidation in dry and wet air were applied for synthesis both with and without an external electrical field. An increased yield of high aspect ratio nanowires with diameters below 100 nm is achieved by combining applied electric field and growth conditions with additional water vapour at the first stage of synthesis. Young’s moduli determined from resonance and bending experiments show similar diameter dependencies and increase above 200 GPa for nanowires with diameters narrower than 50 nm. The nanowires synthesized by simple thermal oxidation possess electrical resistivities about one order of magnitude lower than the nanowires synthesized by electric field assisted approach in wet air. The high aspect ratio, mechanical strength and robust electrical properties suggest CuO nanowires as promising candidates for NEMS actuators.


2005 ◽  
Vol 86 (20) ◽  
pp. 201113 ◽  
Author(s):  
M. Naya ◽  
I. Tsuruma ◽  
T. Tani ◽  
A. Mukai ◽  
S. Sakaguchi ◽  
...  

1992 ◽  
Vol 61 (7) ◽  
pp. 2294-2303 ◽  
Author(s):  
Kimitaka Itoh ◽  
Heiji Sanuki ◽  
Sanae-I. Itoh

2020 ◽  
Vol 117 (5) ◽  
pp. 2288-2293 ◽  
Author(s):  
Kyle Aleshire ◽  
Ilia M. Pavlovetc ◽  
Robyn Collette ◽  
Xiang-Tian Kong ◽  
Philip D. Rack ◽  
...  

Limited approaches exist for imaging and recording spectra of individual nanostructures in the midinfrared region. Here we use infrared photothermal heterodyne imaging (IR-PHI) to interrogate single, high aspect ratio Au nanowires (NWs). Spectra recorded between 2,800 and 4,000 cm−1 for 2.5–3.9-μm-long NWs reveal a series of resonances due to the Fabry–Pérot modes of the NWs. Crucially, IR-PHI images show structure that reflects the spatial distribution of the NW absorption, and allow the resonances to be assigned to the m = 3 and m = 4 Fabry–Pérot modes. This far-field optical measurement has been used to image the mode structure of plasmon resonances in metal nanostructures, and is made possible by the superresolution capabilities of IR-PHI. The linewidths in the NW spectra range from 35 to 75 meV and, in several cases, are significantly below the limiting values predicted by the bulk Au Drude damping parameter. These linewidths imply long dephasing times, and are attributed to reduction in both radiation damping and resistive heating effects in the NWs. Compared to previous imaging studies of NW Fabry–Pérot modes using electron microscopy or near-field optical scanning techniques, IR-PHI experiments are performed under ambient conditions, enabling detailed studies of how the environment affects mid-IR plasmons.


2012 ◽  
Vol 6 (1) ◽  
pp. 43-51
Author(s):  
Vladimír Kovaľ

This paper reports on the controlled manipulation of high aspect ratio ferroelectric microtubes on pre-patterned templates by dielectrophoresis. Microtubes of ferroelectric lead zirconate titanate (PZT, a chemical formula of Pb(Zr0.52Ti0.48 )O3) with an outer diameter of 2 ?m, a length of about 30 ?m and a wall thickness of 400 nm were prepared by vacuum infiltration method using macroporous silicon templates. To position and align tubes at designed places, an alternating electric field was applied to a colloidal suspension of PZT tubes through lithographically defined microelectrodes. This would enable creation of a stable electrical connection to individual tubes for making a testing structure for rapid electrical characterization. Electric-field assisted assembly experiments demonstrated that the frequency and magnitude of the applied electric field control dielectrophoretic long-range forces, and hence spatial movement of the tubes in a non-uniform electric field. The most efficient biasing for the assembly of tubes across the electrode gap of 12 ?m was a square wave signal of 5 Vrms and 10 Hz. By varying the applied frequency in between 1 and 10 Hz, an enhancement in tube alignment was observed due to possible changes in dielectrophoretic torque. The results indicate a great potential for utilizing dielectrophoresis in construction of more complex, hierarchical 3-D device structures using the PZT 1-D like tubes as the building units.


2014 ◽  
Vol 146 ◽  
pp. 77-88 ◽  
Author(s):  
Yacoub Ould Agha ◽  
Olivier Demichel ◽  
Christian Girard ◽  
Alexandre Bouhelier ◽  
Gerard Colas des Francs

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