High Aspect Ratio Tilted Gratings Through Local Electric Field Modulation in Plasma Etching

2021 ◽  
Author(s):  
Zhitian Shi ◽  
Konstantins Jefimovs ◽  
Antonino La Magna ◽  
Marco Stampanoni ◽  
Lucia Romano
Keyword(s):  
Aspect Ratio ◽  
Electric Field ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Local Electric Field ◽  
Field Modulation

scholarly journals Size Distribution, Mechanical and Electrical Properties of CuO Nanowires Grown by Modified Thermal Oxidation Methods

Nanomaterials ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 1051 ◽  
Author(s):  
Raitis Sondors ◽  
Jelena Kosmaca ◽  
Gunta Kunakova ◽  
Liga Jasulaneca ◽  
Matiss Martins Ramma ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Aspect Ratio ◽  
Electric Field ◽  
Thermal Oxidation ◽  
Size Distribution ◽  
High Aspect Ratio ◽  
Growth Conditions ◽  
Cuo Nanowires ◽  
Young’S Moduli ◽  
Order Of Magnitude

Size distribution, Young’s moduli and electrical resistivity are investigated for CuO nanowires synthesized by different thermal oxidation methods. Oxidation in dry and wet air were applied for synthesis both with and without an external electrical field. An increased yield of high aspect ratio nanowires with diameters below 100 nm is achieved by combining applied electric field and growth conditions with additional water vapour at the first stage of synthesis. Young’s moduli determined from resonance and bending experiments show similar diameter dependencies and increase above 200 GPa for nanowires with diameters narrower than 50 nm. The nanowires synthesized by simple thermal oxidation possess electrical resistivities about one order of magnitude lower than the nanowires synthesized by electric field assisted approach in wet air. The high aspect ratio, mechanical strength and robust electrical properties suggest CuO nanowires as promising candidates for NEMS actuators.

Fast Ion Loss and Radial Electric Field in High-Aspect-Ratio Stellarator

1992 ◽  
Vol 61 (7) ◽  
pp. 2294-2303 ◽  
Author(s):  
Kimitaka Itoh ◽  
Heiji Sanuki ◽  
Sanae-I. Itoh
Keyword(s):  
Aspect Ratio ◽  
Electric Field ◽  
High Aspect Ratio ◽  
Radial Electric Field ◽  
Fast Ion

Plasma etching of high aspect ratio features in SiO2 using Ar/C4F8/O2 mixtures: A computational investigation

2019 ◽  
Vol 37 (3) ◽  
pp. 031304 ◽  
Author(s):  
Shuo Huang ◽  
Chad Huard ◽  
Seungbo Shim ◽  
Sang Ki Nam ◽  
In-Cheol Song ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Computational Investigation

High efficiency radial-junction Si nanohole solar cells formed by self-assembling high aspect ratio plasma etching

2011 ◽  
Author(s):  
Hua-Min Li ◽  
Dae-Yeong Lee ◽  
Yeong-Dae Lim ◽  
Cheng Yang ◽  
Gang Zhang ◽  
...  
Keyword(s):  
Solar Cells ◽  
Aspect Ratio ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
High Efficiency ◽  
Self Assembling

scholarly journals High aspect ratio lead zirconate titanate tube structures: II. Directed assembly via dielectrophoresis

2012 ◽  
Vol 6 (1) ◽  
pp. 43-51
Author(s):  
Vladimír Kovaľ
Keyword(s):  
Aspect Ratio ◽  
Electric Field ◽  
Lead Zirconate Titanate ◽  
High Aspect Ratio ◽  
Colloidal Suspension ◽  
Lead Zirconate ◽  
Uniform Electric Field ◽  
Outer Diameter ◽  
Electrode Gap ◽  
Zirconate Titanate

This paper reports on the controlled manipulation of high aspect ratio ferroelectric microtubes on pre-patterned templates by dielectrophoresis. Microtubes of ferroelectric lead zirconate titanate (PZT, a chemical formula of Pb(Zr0.52Ti0.48 )O3) with an outer diameter of 2 ?m, a length of about 30 ?m and a wall thickness of 400 nm were prepared by vacuum infiltration method using macroporous silicon templates. To position and align tubes at designed places, an alternating electric field was applied to a colloidal suspension of PZT tubes through lithographically defined microelectrodes. This would enable creation of a stable electrical connection to individual tubes for making a testing structure for rapid electrical characterization. Electric-field assisted assembly experiments demonstrated that the frequency and magnitude of the applied electric field control dielectrophoretic long-range forces, and hence spatial movement of the tubes in a non-uniform electric field. The most efficient biasing for the assembly of tubes across the electrode gap of 12 ?m was a square wave signal of 5 Vrms and 10 Hz. By varying the applied frequency in between 1 and 10 Hz, an enhancement in tube alignment was observed due to possible changes in dielectrophoretic torque. The results indicate a great potential for utilizing dielectrophoresis in construction of more complex, hierarchical 3-D device structures using the PZT 1-D like tubes as the building units.

High aspect ratio plasma etching of bulk lead zirconate titanate

2006 ◽  
Author(s):  
Srimath S. Subasinghe ◽  
Abhijat Goyal ◽  
Srinivas A. Tadigadapa
Keyword(s):  
Aspect Ratio ◽  
Lead Zirconate Titanate ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Lead Zirconate ◽  
Zirconate Titanate

Low-temperature plasma etching of high aspect-ratio densely packed 15 to sub-10 nm silicon features derived from PS-PDMS block copolymer patterns

2014 ◽  
Vol 25 (28) ◽  
pp. 285301 ◽  
Author(s):  
Zuwei Liu ◽  
Xiaodan Gu ◽  
Justin Hwu ◽  
Simone Sassolini ◽  
Deirdre L Olynick
Keyword(s):  
Block Copolymer ◽  
Low Temperature ◽  
Aspect Ratio ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Low Temperature Plasma ◽  
Temperature Plasma

scholarly journals Profile Evolution of High Aspect Ratio Silicon Carbide Trenches by Inductive Coupled Plasma Etching

2017 ◽  
Vol 26 (1) ◽  
pp. 135-142 ◽  
Author(s):  
Karen M. Dowling ◽  
Elliot H. Ransom ◽  
Debbie G. Senesky
Keyword(s):  
Silicon Carbide ◽  
Aspect Ratio ◽  
Plasma Etching ◽  
High Aspect Ratio
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