Room Temperature Deposition of Indium Zinc Oxide Films on PES Substrate by LF Magnetron Sputtering

2007 ◽  
Vol 51 (2) ◽  
pp. 589-593 ◽  
Author(s):  
Eun Lyoung Kim ◽  
Sang Kooun Jung ◽  
Choong Soo Kim ◽  
Duck Kyu Park ◽  
Ho-Young Cho ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Oxide Films ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide ◽  
Temperature Deposition

Structure and Internal Stress of Tin-Doped Indium Oxide and Indium–Zinc Oxide Films Deposited by DC Magnetron Sputtering

2007 ◽  
Vol 46 (12) ◽  
pp. 7806-7811 ◽  
Author(s):  
Eriko Nishimura ◽  
Tomoko Sasabayashi ◽  
Norihiro Ito ◽  
Yasushi Sato ◽  
Kentaro Utsumi ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide

Properties of Indium Zinc Oxide Films on Various Polymer Substrates Deposited by Low-Frequency 60 Hz Magnetron Sputtering Method

2007 ◽  
Vol 470 (1) ◽  
pp. 241-250
Author(s):  
Eun Lyoung Kim ◽  
Sang Kooun Jung ◽  
Sang Ho Sohn ◽  
Duck Kyu Park ◽  
Sang Mun Lee ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Low Frequency ◽  
Polymer Substrates ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide

Indium zinc oxide films deposited on PET by LF magnetron sputtering

2007 ◽  
Vol 40 (6) ◽  
pp. 1784-1788 ◽  
Author(s):  
Eun Lyoung Kim ◽  
Sang Kooun Jung ◽  
Sang Ho Sohn ◽  
Duck Kyu Park
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide
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