Internal Stress Dependence of Aluminum Doped Zinc Oxide Thin Films Deposited by DC Magnetron Sputter on Deposition Conditions

2010 ◽  
Vol 56 (3) ◽  
pp. 805-808 ◽  
Author(s):  
T. KIM ◽  
Kangwhan Lee
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Internal Stress ◽  
Stress Dependence ◽  
Oxide Thin Films ◽  
Aluminum Doped Zinc Oxide ◽  
Magnetron Sputter ◽  
Deposition Conditions

Effect of film thickness on properties of aluminum doped zinc oxide thin films deposition on polymer substrate

2013 ◽  
Vol 24 (12) ◽  
pp. 5091-5096 ◽  
Author(s):  
Nihan Akin ◽  
S. Sebnem Cetin ◽  
Mehmet Cakmak ◽  
Tofig Memmedli ◽  
Suleyman Ozcelik
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Film Thickness ◽  
Polymer Substrate ◽  
Oxide Thin Films ◽  
Aluminum Doped Zinc Oxide

Substrate dependent internal stress in sputtered zinc oxide thin films

1992 ◽  
Vol 71 (9) ◽  
pp. 4333-4336 ◽  
Author(s):  
Jwo‐Huei Jou ◽  
Min‐Yung Han ◽  
Duen‐Jen Cheng
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Internal Stress ◽  
Oxide Thin Films
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