Substrate-dependent Internal Stress of Aluminum-doped Zinc-oxide Thin Films Deposited by DC Magnetron Sputtering

2011 ◽  
Vol 58 (4) ◽  
pp. 787-791 ◽  
Author(s):  
Taewon Kim
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Aluminum Doped Zinc Oxide

Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

2011 ◽  
Vol 519 (20) ◽  
pp. 6910-6915 ◽  
Author(s):  
Hyeongsik Park ◽  
Kyungsoo Jang ◽  
Krishna Kumar ◽  
Shihyun Ahn ◽  
Jaehyun Cho ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Mechanism Analysis ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films
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