Experimental Research on Photoresist Processing Micro-Structure of SU-8

2014 ◽  
Vol 568-570 ◽  
pp. 1667-1670
Author(s):  
Yun Feng Bu ◽  
Zhi Wei Hou ◽  
Quan Ping Sun ◽  
Xiao Hu Zheng

Process researching on high resolution and high ratio of depth to width of the negative photoresist (SU-8) process on micro-structure, by means of orthogonal experimental,drawing that the soft baking temperature and soft baking time have the greatest impact on the quality of the lithography. When the thick of photoresist is between 120μm with 340μm, the soft baking temperature is 90°C and the soft baking time is between 50min with 120min, the graphics quality is best. Then, analysis of characteristics of the ratio of high to depth on micro-structure electroforming shows that the mass transfer is the restrictive link of micro electroforming. Which can achieve the process parameters optimization of the lithography and electroforming micro-structure.

2007 ◽  
Vol 364-366 ◽  
pp. 634-639 ◽  
Author(s):  
Wei Shin Lin ◽  
King Sun Lee ◽  
Shih Miao Huang ◽  
Rong Yuan Jou ◽  
Jui Chang Lin

Chips scraping each other during transportation, and chips coming into contact with water or air will cause oxidization resulting in poor quality products. The chips need to be well packed and to be protected from the environment. The method of Surface Mount Component (SMC) packing using plastic carrier tape can reduce chip damage. This study focuses on the extrusion process parameters optimization of plastic carrier tape. Because each extrusion process produces 270 pieces of carrier tape, the tape size is 1.35mmX2.25mmX1.35mm and is extremely difficult to reach the tolerance standard. This study utilized a practical test to explore various factors on the quality of the carrier tape, such as the rotational speed of extruder screw motor and extrusion mold; the negative pressure of extrusion mold; and the temperature of the extrusion mold. These experiments could find out an optimal extrusion process.


2013 ◽  
Vol 561 ◽  
pp. 223-227
Author(s):  
Xian Kui Zeng ◽  
Shuai An ◽  
Dong Wang ◽  
Guo Zong Song ◽  
Na Ren

Experimental research on the relationship between rubber open mill mixing process parameters of roller pitch, roller speed and roller speed ratio changes and mix quality. The results show that the process parameters changes in open mill mixing process have significant effects on mixing quality and efficiency. And get the best process parameters optimization in open mill mixing process: the best changes trend of roller pitch, roller speed and roller speed ratio are from small to big, from small to big and from big to small.


2011 ◽  
Vol 29 (8) ◽  
pp. 910-917 ◽  
Author(s):  
Yugang Li ◽  
Huanbin Liu ◽  
Jigeng Li ◽  
Jinsong Tao

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