A Phase Compensation Technique of Sampling Moiré Method for Accurate Single-Shot Phase Analysis
2011 ◽
Vol 70
◽
pp. 243-248
Keyword(s):
Recently, a technique for fast and accurate phase analysis called sampling moiré method has been developed for measurement of small-displacement distribution. In this study, a distribution of phase error caused by linear interpolation in case with mismatch between the sampling pitch and the grating pitch is theoretically analyzed. Moreover, a technique for effective phase compensation is proposed to reduce the periodic phase error. The performance of our compensation method is validated by a computer simulation. Phase analysis can be performed more accurately even in the case that the sampling pitch does not match to the grating pitch strictly.
Keyword(s):
2012 ◽
Vol 241-244
◽
pp. 641-647
2011 ◽
Vol 83
◽
pp. 48-53
◽
Keyword(s):
2010 ◽
Vol 45
(6)
◽
pp. 1137-1149
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Keyword(s):
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