Experiments on Dicing Monocrystalline Silicon Wafer Using Micro Abrasive Water Jet

2011 ◽  
Vol 287-290 ◽  
pp. 2863-2868 ◽  
Author(s):  
Yu Yong Lei ◽  
Dai Jun Jiang ◽  
Ke Fu Liu ◽  
Pu Hua Tang
Keyword(s):  
Surface Roughness ◽  
Surface Quality ◽  
Silicon Wafer ◽  
Flow Rate ◽  
Feed Rate ◽  
Water Jet ◽  
Monocrystalline Silicon ◽  
Abrasive Water Jet ◽  
Feed System ◽  
Moving Jet

The experiments on dicing monocrystalline silicon wafer using micro abrasive water jet turning were performed. A specifically designed water jet machine tool with four axes was developed and a specially designed cutting head has developed, in which the inside diameter of orifice and focusing tube is f125 mm and f500 mm respectively, while the silicon carbide solid abrasives with average diameter of 25-100 mm was used. In order to control the flow rate of micro abrasives precisely, an abrasive feed system with auger mechanism driven by DC motor reducer was used. The diameters of monocrystalline silicon bars are around 50 mm. Two basic turning methods, i.e. turning with stationary jet and turning with moving jet were applied. The preliminary experimental results such as kerf width, wafer thickness, surface quality etc. were analyzed. It was found that micro abrasive water jet can be used to precisely turn brittle materials like monocrystalline silicon. The turned wafer with thickness of 1 mm above could be achieved. A thinner wafer less than 1 mm is difficult to obtain during experiments because of cracking or chipping. Experiments demonstrate that the wafer surface has macro stripping characteristics similar to linear cutting. It was observed that there is less waviness and smooth surface on the turned wafer when with moving jet. And it depends greatly on the water jet pressure, feed rate of the jet, rotation speed of silicon bar, abrasive particle size as well as flow rate of abrasive. The detailed analysis indicates that the surface roughness of turned wafer with moving jet is around Ra 1.5-5.6 μm, while that of turned wafer with stationary jet is around Ra6.3 μm, when other conditions are same. The results show that surface quality turning with moving jet is obviously better than that of stationary jet. Smaller surface roughness of turned wafer could be obtained when finer abrasive is used. The experiment shows also that the wafer is typically tapered with either the stationary jet or moving jet. There is a concave on the turned surface when feed rate of the jet is too low or dwell time is too long. This is attributed to the jet rebound from one face to the other. Therefore there is an optimizing rotational speed during turning. This study indicates that dicing mono crystalline silicon wafer using micro abrasive water jet turning has potential application in semiconductor industry.

Experimental investigation into polishing of monocrystalline silicon wafer using double-disc chemical assisted magnetorheological finishing process

2021 ◽  
pp. 095440622098384
Author(s):  
Mayank Srivastava ◽  
Pulak M Pandey
Keyword(s):  
Surface Roughness ◽  
Silicon Wafer ◽  
Flow Rate ◽  
Silicon Wafers ◽  
Monocrystalline Silicon ◽  
Slurry Flow ◽  
Magnetorheological Finishing ◽  
Finishing Process ◽  
Process Factors ◽  
Slurry Flow Rate

In the present work, a novel hybrid finishing process that combines the two preferred methods in industries, namely, chemical-mechanical polishing (CMP) and magneto-rheological finishing (MRF), has been used to polish monocrystalline silicon wafers. The experiments were carried out on an indigenously developed double-disc chemical assisted magnetorheological finishing (DDCAMRF) experimental setup. The central composite design (CCD) was used to plan the experiments in order to estimate the effect of various process factors, namely polishing speed, slurry flow rate, percentage CIP concentration, and working gap on the surface roughness ([Formula: see text]) by DDCAMRF process. The analysis of variance was carried out to determine and analyze the contribution of significant factors affecting the surface roughness of polished silicon wafer. The statistical investigation revealed that percentage CIP concentration with a contribution of 30.6% has the maximum influence on the process performance followed by working gap (21.4%), slurry flow rate (14.4%), and polishing speed (1.65%). The surface roughness of polished silicon wafers was measured by the 3 D optical profilometer. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were carried out to understand the surface morphology of polished silicon wafer. It was found that the surface roughness of silicon wafer improved with the increase in polishing speed and slurry flow rate, whereas it was deteriorated with the increase in percentage CIP concentration and working gap.

A Method to Reduce Milling Time for Ti-6Al-4V Alloy for Controlled Depth Milling Using Abrasive Water Jet Machining

2011 ◽  
Vol 383-390 ◽  
pp. 1764-1768 ◽  
Author(s):  
Vijay Kumar Pal ◽  
Puneet Tandon
Keyword(s):  
Flow Rate ◽  
Traverse Speed ◽  
Water Jet ◽  
Abrasive Water Jet ◽  
Surface Waviness ◽  
Feed System ◽  
Machining Processes ◽  
Machining Time ◽  
Abrasive Water Jet Machining ◽  
Conventional Machining

This Abrasive Water Jet Machining (AWJM) process is usually used to through cut materials which are difficult to cut by conventional machining processes. This process may also be used for controlled depth milling (CDM) of materials. This work primarily focuses on controlling the abrasive flow rate to reduce the time for machining the component. Here, an experimental setup is made with a modified attachment for abrasive feed system to machine for Ti-6Al-4V alloy. The work also investigates the surface morphology, tolerance on depth of machining and surface waviness for the modified setup. With change in mass flow rate of abrasive, the traverse speed is altered and its effects on the machining time are studied. It is observed that traverse speed is an important parameter in the case of CDM for AWJM. It is also shown that surface waviness can be reduced as traverse speed is increased by using modified abrasive feeding system.

Investigations on surface roughness and tribology of miniature brass gears manufactured by abrasive water jet machining

2017 ◽  
Vol 232 (22) ◽  
pp. 4193-4202 ◽  
Author(s):  
Thobi Phokane ◽  
Kapil Gupta ◽  
Munish Kumar Gupta
Keyword(s):  
Surface Roughness ◽  
Mass Flow Rate ◽  
Mass Flow ◽  
Flow Rate ◽  
Optimization Technique ◽  
Water Jet ◽  
Machining Parameters ◽  
Abrasive Water Jet ◽  
Abrasive Water Jet Machining ◽  
Particle Swarm Optimization Technique

Surface roughness parameters are important indicators for determining the operating performance, tribology behavior, wear and tear characteristics, and service life of engineered parts including gears. This article presents the investigation on surface roughness, and tribology and wear aspects of miniature brass gears manufactured by abrasive water jet machining. Experiments have been conducted based on Taguchi's robust design technique with L9 orthogonal array to machine external spur-type miniature gears of brass having 8.4 mm pitch diameter, 12 teeth, and 5 mm thickness. The effect of three important process parameters namely water jet pressure, abrasive mass flow rate, and stand-off distance on mean roughness depth of miniature gears are analyzed. Surface roughness is found to decrease with the increase in the water jet pressure and abrasive mass flow rate, and increases with the increase in the stand-off distance. Particle swarm optimization technique has been used for parametric optimization to minimize the surface roughness of miniature gears. Confirmation experiment conducted at optimized abrasive water jet machining parameters resulted in superfine surface finish with mean roughness depth value of 4.1 µm superior than the finish obtained by other advanced processes for brass gears. The investigated values of bearing area characteristics, skewness, kurtosis, and friction coefficient confirm the tribological fitness of the miniature brass gear machined at optimum abrasive water jet machining parameters.

scholarly journals Influence of Abrasive Water Jet (AWJ) on Surface Roughness

2021 ◽  
Vol 6 (3) ◽  
pp. 132-140
Author(s):  
Ameer Jalil Nader ◽  
K. Shather Saad
Keyword(s):  
Surface Roughness ◽  
Feed Rate ◽  
Water Jet ◽  
Standoff Distance ◽  
Abrasive Water Jet ◽  
Average Surface Roughness ◽  
Machining Processes ◽  
Average Surface ◽  
Water Jet Cutting ◽  
Abrasive Water Jet Cutting

Abrasive water jet (AWJ) is one of the most advanced and valuable non-traditional machining processes because of its massive advantages of removing metals ranging from hard to soft. This paper focused on studying the influence of jet pressure, feed rate and standoff distance on surface roughness during cutting carbon steel using abrasive water jet cutting. A surface roughness device assessed the surface roughness by performing sixteen experiments to identify the distinct texture of the surface. Based on the experiences, the best surface roughness value was 3.14 μm at jet pressure 300 MPa, standoff distance 4mm and feed rate 30 mm/min. The Taguchi method was introduced to implement the experiments and indicate the most influential process parameters on average surface roughness. The experimental results reveal that feed rate has a significant effect on average surface roughness.

Effect of Abrasive Flow Rate in Milling with Abrasive Water Jet

2011 ◽  
Vol 110-116 ◽  
pp. 196-201 ◽  
Author(s):  
Vijay Kumar Pal ◽  
Puneet Tandon
Keyword(s):  
Flow Rate ◽  
Traverse Speed ◽  
Flaw Detector ◽  
Water Jet ◽  
Abrasive Water Jet ◽  
Feed System ◽  
Destructive Testing ◽  
Machining Processes ◽  
Machining Time ◽  
Ultrasonic Flaw

This Abrasive Water Jet Machining (AWJM) process is usually used to cut the materials which are difficult to cut by conventional machining processes. In this work, controlled depth milling (CDM) is done using AWJM. This work primarily focuses on controlling the abrasive flow rate to reduce the time for machining the component. Here, an experimental setup is made with a modified attachment for abrasive feed system to machine stainless steel. The work also investigates the surface morphology, tolerance on depth of machining and surface waviness for the modified setup. With change in mass flow rate of abrasive, the traverse speed may also be altered and its effects on the machining time are controlled. This work also employs Non-destructive Testing (NDT) method i.e. ultrasonic flaw detector to find out internal defects and cracks in the milled material.

scholarly journals IMPLEMENTATION OF TAGUCHI APPROACH FOR PTIMIZATION OF ABRASIVE WATER JET MACHINING PROCESS PARAMETERS

2012 ◽  
pp. 224-228
Author(s):  
LEELADHAR NAGDEVE ◽  
VEDANSH CHATURVEDI ◽  
JYOTI VIMAL
Keyword(s):  
Surface Roughness ◽  
Taguchi Method ◽  
Process Parameters ◽  
Flow Rate ◽  
Orthogonal Array ◽  
High Velocity ◽  
Water Jet ◽  
Process Parameter ◽  
Abrasive Water Jet ◽  
Abrasive Water Jet Machining

In this paper, Taguchi method is applied to find optimum process parameter for Abrasive water jet machining (AWJM). Abrasive water jet machining is a non–traditional process of removal of material by impact erosion of high pressure, high velocity of water and entrained high velocity of grit abrasives on a work piece. Experimental investigation were conducted to assess the influence of abrasive water jet machining (AWJM) process parameters on MRR and surface Roughness (Ra) of aluminium. The approach was based on Taguchi’s method and analysis of variance (ANOVA) to optimize the AWJM process parameter for effective machining and to predict the optimal choice for each AWJM parameter such as pressure, standoff distance, Abrasive flow rate and Traverse rate. For each combination of orthogonal array we have conducted three experiments and with the help of ANOVA it is found that these parameters have a significant influence on machining characteristics such as metal removal rate (MRR) and surface roughness (SR). The analysis of the Taguchi method reveals that, in general the standoff distance significantly affects the MRR while, Abrasive flow rate affects the surface Roughness. Experiments are carried out using (L9) orthogonal array by varying pressure, sta

A Study on Erosion Performance of Monocrystalline Silicon in Ultrasonic Vibration-Assisted Abrasive Water Jet Machining

2013 ◽  
Vol 797 ◽  
pp. 39-45 ◽  
Author(s):  
Zhong Wei Zhang ◽  
Hong Tao Zhu ◽  
Chuan Zhen Huang ◽  
Jun Wang ◽  
Peng Yao ◽  
...  
Keyword(s):  
Mass Flow Rate ◽  
Ultrasonic Vibration ◽  
Flow Rate ◽  
Abrasive Particle ◽  
Particle Diameter ◽  
Impact Angle ◽  
Water Jet ◽  
Monocrystalline Silicon ◽  
Abrasive Water Jet ◽  
Jet Impact

Ultrasonic vibration-assisted machining (UVAM) is an effective and promising technology for processing hard and brittle materials, it has been explored in many experimental and theoretical investigations. In this paper, a study on the erosion performance of monocrystalline silicon with UVAM is presented and discussed. In the erosion experiments, monocrystalline silicon wafers were eroded by the abrasive water jet machine assisted with an ultrasonic vibration system. A contrast experiment was carried out firstly to study the influence of the ultrasonic vibration, and then an orthogonal experiment investigation was carried out to understand the effect of process variables (the abrasive particle diameter, jet impact angle, standoff distance, abrasive mass flow rate and ultrasonic vibration power) on the depth of erosion and material removal rate (MRR). The experimental results revealed that ultrasonic vibration-assisted abrasive water jet erosion (UVA-AWJE) can obviously improve the depth of the erosion and MRR compared with those in traditional AWJE and the variation trends of the effect of the abrasive particle diameter, jet impact angle, standoff distance and abrasive mass flow rate on the erosion performance in UVA-AWJE are very similar to those effect in the traditional AWJ machining.

Experimental Study on the Surface Roughness of 1060 Aluminum Alloy Cut by Abrasive Water Jet

2019 ◽  
Vol 950 ◽  
pp. 32-37 ◽  
Author(s):  
Qi Wen Xu ◽  
Chi Heng Qiang ◽  
Chu Wen Guo
Keyword(s):  
Surface Roughness ◽  
Aluminum Alloy ◽  
Surface Quality ◽  
Dominant Role ◽  
Traverse Speed ◽  
Water Jet ◽  
Abrasive Water Jet ◽  
Work Pressure ◽  
Cutting Surface

Through the experiment of cutting 1060 Aluminum Alloy by Abrasive Water Jet (AWJ), the surface roughness of material which is cut by AWJ is controlled by the cutting work pressure, cutting stand-off distance, cutting traverse speed and the abrasive diameter which used in AWJ. Measuring the cutting surface roughness of 1060 Aluminum Alloy by stereomicroscope and surfagauge, among the factor which can affect the surface roughness, the cutting traverse speed play a dominant role to control the surface roughness in the process of cutting. As the result of the surface roughness of 1060 Aluminum Alloy at different cutting depth is different, which can be separated in two different zones (Smooth area and Rough zone). As the result of experiment, the abrasive diameter has little effect to change the surface roughness between two different zones. The surface quality of rough zone can be improved when change the diameter of abrasive: with the diameter of abrasive increase, the surface quality of rough zone become better. A higher cutting pressure can improve the surface quality of the cutting surface of 1060 Aluminum Alloy. While increase the cutting traverse speed in the process of cutting can decrease the surface quality of 1060 Aluminum Alloy cutting surface. In a certain range, increase the cutting stand-off distance of AWJ can decrease the surface roughness of the cutting surface, and the roughness of cutting surface will change little when the stand-off distance increases to a certain extent.

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