Effect of Substrate Temperature on the Opto-Electrical Propertites of Ti Doped ITO Films Deposited by RF Magnetron Sputtering
2012 ◽
Vol 602-604
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pp. 1399-1403
Keyword(s):
Ti doped ITO (ITO:Ti) thin films were fabricated on glass substrates by RF magnetron sputtering using only one piece of ITO:Ti ceramic target at different substrate temperature (Ts). The effect of substrate temperature on structural, electrical, and optical properties of the films was investigated. It is confirmed that the resistivity of the films decreases with the increase of Ts till the minimum value of 2.5×10-4 Ω•cm and the transmittance in visible wavelengths is higher than 90%. "Blue shift" and "red shift" of UV absorption edge of the film were observed when Ts200 °CHeaders and footers
2013 ◽
Vol 20
(05)
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pp. 1350045
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2010 ◽
Vol 43
(1)
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pp. 228-234
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2013 ◽
Vol 54
(10)
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pp. 2055-2058
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1998 ◽
Vol 322
(1-2)
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pp. 274-281
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EFFECT OF THICKNESS ON THE PROPERTIES OF In-DOPED ZnO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
2011 ◽
Vol 25
(07)
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pp. 995-1003
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2012 ◽
Vol 356
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pp. 012026
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