Characterization and Properties of CrTiN Films
2012 ◽
Vol 625
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pp. 301-303
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A series of CrTiN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray diffraction analysis shows that the CrTiN have preferential orientation of (200). The films show low friction and low wear rate at a certain percentage of the Ti content.