Effects of Copper Interlayer and Annealing on Structure and Mechanical Properties of Diamond-Like Carbon Films by Cathode Arc Evaporation

2012 ◽  
Vol 629 ◽  
pp. 25-31
Author(s):  
Bing Zhou ◽  
Xiao Hong Jiang ◽  
A.V. Rogachev ◽  
Rui Qi Shen

Diamond-like carbon (DLC) bilayer films with Cu interlayer were prepared on silicon substrate by direct-current and pulsed cathode arc plasma technique, and annealed at various temperatures in vacuum. Structure, morphology and mechanical properties of the bilayer films were investigated by Raman spectroscopy, Auger electron spectroscopy, scanning electron microscopy and atomic force microscopy, surface profilometer and Vickers sclerometer. The results show that Cu interlayer changes the bilayer microstructure, including the thickness and element distribution of diffusion layer, the relative fraction of sp3/sp2bonding and growth model of bilayer. A simple three-layer model was used to describe the interdiffusion between Cu and C layer. Cu interlayer could be more effective against graphitization upon annealing. Morphological characteristics of the films were studied by analyzing the surface features of substrate. Cu/DLC bilayer exhibits highly dispersed nano-agglomerates with smaller size on the surface due to low surface energy of Cu interlayer. The stress and hardness of the films were affected accordingly. Cu/DLC bilayer shows a relatively high hardness at low annealing temperature but the stress almost no change. By changing Cu interlayer and annealing temperature, excellent DLC films could be designed for the protective, hard, lubricating and wear resistant coatings on mechanical, electronic and optical applications.

2012 ◽  
Vol 208 ◽  
pp. 101-108 ◽  
Author(s):  
Bing Zhou ◽  
A.V. Rogachev ◽  
Zhubo Liu ◽  
Xiaohong Jiang ◽  
Ruiqi Shen ◽  
...  

1995 ◽  
Vol 397 ◽  
Author(s):  
Ashok Kumar ◽  
R. B. Inturi ◽  
Y. Vohra ◽  
U. Ekanayake ◽  
N. Shu ◽  
...  

ABSTRACTDiamond-like carbon (DLC) films have a unique combination of physical and chemical properties such as high hardness, optical transparency, low coefficient of friction and chemical inertness. A pulsed laser (248 nm) has been used to ablate a pyrolytic graphite target to deposit DLC films on Si (100) and 7059 Corning glass substrates. The deposition was carried out in high vacuum (≤ 10−6 Torr) at different temperatures ranging from room temperature to 400°C. The films were characterized by x-ray diffraction, scanning electron microscope, and Raman spectroscopie techniques. The mechanical properties (hardness and Young's modulus) of these films were characterized by nanoindentation. We have found that the films deposited at room temperature and 100°C show the characteristic features of DLC films and have the better hardness and modulus properties compared to the films fabricated at higher temperatures, which transform into amorphous carbon. Correlations of pulsed laser deposition process parameters with the properties of deposited DLC films will be discussed in this paper.


2012 ◽  
Vol 189 ◽  
pp. 167-171 ◽  
Author(s):  
Bing Zhou ◽  
Xiao Hong Jiang ◽  
Zhu Bo Liu ◽  
A.V. Rogachev ◽  
Rui Qi Shen ◽  
...  

Using direct-current (DC) and pulsed double-excitation cathode arc plasma technique, diamond-like carbon (DLC) bilayers with nano-scaled interlayer of Cu and Ti were synthesized on silicon substrate. The effect of interlayer on the structure, morphology and mechanical properties of bilayer films were investigated. The change in bilayers structure occurred during interlayer introduction and greatly affected the hardness and internal stress of bilayers. Interlayer nature changed the microstructure of bilayers that in the thickness and element content of diffusion layer. Ti/DLC bilayer exhibited a similarly morphological character to DLC monolayer, whereas Cu interlayer in DLC films leaded to a formation of nanostructured surface and lower root mean square roughness due to the absence of Cu-C bond.


2000 ◽  
Vol 6 (S2) ◽  
pp. 432-433
Author(s):  
X. Chen ◽  
J. M. Gibson ◽  
J. Sullivan

Hydrogen-free amorphous diamond-like carbon films have stimulated great interest because of their useful properties, such as high hardness, chemical inertness, thermal stability, wide optical gap, and negative electron affinity[l]. Consequently, they may have various potential applications in mechanical and optical coatings, MEMS systems, chemical sensors and electronic devices. Amorphous diamond-like carbon films often contains significant amounts of four-fold or sp3 bonded carbon, in contrast to amorphous carbon films prepared by evaporation or sputtering which consist mostly of three-fold or sp2 bonded carbon. The ratio and the structure configurations of these three-fold and four-fold carbon atoms certainly decide the properties of these amorphous diamond-carbon films. Although the ratio of three-fold and four-fold carbon has been studied with Raman spectroscopy and electron-loss-energy spectroscopy, very little has been understood regarding key questions such as how the three-fold and the four-fold carbon atoms are integrated in the film, and what structures those three-fold carbon atoms take.


2008 ◽  
Vol 31 (5) ◽  
pp. 813-818 ◽  
Author(s):  
S. B. Singh ◽  
M. Pandey ◽  
N. Chand ◽  
A. Biswas ◽  
D. Bhattacharya ◽  
...  

2008 ◽  
Vol 17 (3) ◽  
pp. 396-404 ◽  
Author(s):  
Zhenyu Zhang ◽  
Xinchun Lu ◽  
Dongming Guo ◽  
Jun Xu ◽  
Jianbin Luo

2010 ◽  
Vol 19 (5-6) ◽  
pp. 562-566 ◽  
Author(s):  
Chehung Wei ◽  
Chao-I Wang ◽  
Fong-Cheng Tai ◽  
Kuen Ting ◽  
Rwei-Ching Chang

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