Null Compensator Testing Convex Freeform Surface Mirror with CGH Technology
2013 ◽
Vol 660
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pp. 163-166
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Keyword(s):
The Computer Generated Hologram(CGH)technique is the main method for optical testing the free form surface .For testing a convex free form surface mirror, a CGH element with the surface testing, interferometer and free form mirror precise position function was designed by use of appropriative software, the testing precision was less than 0.011λ(λ=632.8nm)in RMS value by this means.