The Design of Micro Electrostatic Structure with Low Driving Voltage

2013 ◽  
Vol 663 ◽  
pp. 560-565
Author(s):  
Zhi Xue Chen ◽  
Xu Han Dai ◽  
Qi Zhang ◽  
Wen Lu ◽  
Gui Fu Ding
Keyword(s):  
Actuation Voltage ◽  
Driving Voltage ◽  
Electrostatic Actuator ◽  
Fixed Electrode ◽  
Current Calculation

A new design of micro electrostatic actuator with low driving voltage is presented in this paper. It can reduce the operation voltage effectively without decreasing the gap between electrodes. In the proposed actuator with low driving voltage, the fixed electrode was designed as a stepped structure to divide the driving process into two steps. The peripheral electrode and inner electrode will be closed one by one. The two step pull-in processes will lower the actuation voltage significantly. According to the current calculation, the new structure with low driving voltage can reduce the actuate voltage significantly.

Development of a Linearly Tunable Modified Butterfly-Shape MEMS Capacitor

2008 ◽  
Author(s):  
Mohammad Shavezipur ◽  
Seyed Mohammad Hashemi ◽  
Amir Khajepour ◽  
Patricia Nieva
Keyword(s):  
Actuation Voltage ◽  
Insulator Layer ◽  
Plate Electrode ◽  
Electrostatically Actuated ◽  
Monolithically Integrated ◽  
Tunable Capacitors ◽  
Capacitance Voltage ◽  
Rf Devices ◽  
Fixed Electrode ◽  
Structural Layer

This paper presents a novel geometry and modified structural stiffness for electrostatically actuated MEMS tunable capacitors. The design is based on parallel-plate configuration and four triangular plates are put together to form a butterfly shape flexible moving electrode. Each triangle is suspended by three uneven supporting beams. The capacitor is also equipped with extra beams, called here the “middle beams”, located under the triangles’ corners (nodes). An analytical model is developed to solve the governing equations of a triangular-plate electrode with uneven sides and supporting beams, where the stiffness of the middle beams is gradually added to the system as actuation voltage increases. The numerical simulations reveal that each triangle can be individually tuned up to 150% and the capacitance-voltage (C-V) response is broken into small sections due to added middle beams. Using the model developed in this paper and by design optimization, a linear C-V response is obtained, where the tunability in linear region reaches 100%. The simplicity of the proposed design allows the device to be fabricated using a three-structural-layer process such as PolyMUMPs and could therefore be monolithically integrated with other RF devices and ICs. Moreover, adding additional insulator layer on top of the fixed electrode increases the tunability to over 200% displaying a smooth and low sensitive response.

scholarly journals A low actuation voltage electrostatic actuator for RF MEMS switch applications

2007 ◽  
Vol 17 (8) ◽  
pp. 1649-1656 ◽  
Author(s):  
Chia-Hua Chu ◽  
Wen-Pin Shih ◽  
Sheng-Yuan Chung ◽  
Hsin-Chang Tsai ◽  
Tai-Kang Shing ◽  
...  
Keyword(s):  
Rf Mems ◽  
Actuation Voltage ◽  
Electrostatic Actuator ◽  
Rf Mems Switch ◽  
Mems Switch

Development of a reliable microgripper system based on failure analysis

2014 ◽  
Vol 41 (3) ◽  
pp. 318-326
Author(s):  
Nayyer Abbas Zaidi ◽  
Shafaat Ahmed Bazaz
Keyword(s):  
Failure Analysis ◽  
Design Methodology ◽  
Actuation Voltage ◽  
Capacitive Sensor ◽  
Behavioral Model ◽  
Failure Model ◽  
Electrostatic Actuator ◽  
Performance Limits ◽  
Content Type ◽  
Contact Sensing

Purpose – The purpose of this paper is to present the design of a microgripper system that comprises a dual jaw actuation mechanism with contact sensing. Design/methodology/approach – Interdigitated lateral comb-drive-based electrostatic actuator is used to move the gripper arms. Simultaneous contact sensing of the gripper jaws has been achieved through transverse comb-based capacitive sensor. The fabricated microgripper produces a displacement of 16 μm at gripper jaws for an applied actuation voltage of 45 V. Findings – It is observed that the microgripper fails to operate for the maximum performance limits (70 μm jaws displacement) and produces uncontrolled force at the tip of the jaws > 45 V. Originality/value – A novel behavioral model of the microgripper system is proposed using the fabricated dimensions of the system to carry out a detailed analysis to understand the cause of this failure. The failure analysis shows that the microgripper system failed to operate in its designed limits due to the presence of side instability in the designed combs structure. Our proposed failure model helps in redesigning the actuator to ensure its operation above 45 V so that the gripper jaw can be displaced to its maximum limit of 70 μm and also result in the increase of the controlled force from 250 to 303 μN at the microgripper jaws.

scholarly journals Experimental Validation for an Extended-Stability Electrostatic Actuator

2010 ◽  
Author(s):  
S. Towfighian ◽  
A. Seleim ◽  
E. M. Abdel-Rahman ◽  
G. R. Heppler
Keyword(s):  
Closed Loop ◽  
Input Voltage ◽  
Dynamic Responses ◽  
Voltage Regulator ◽  
Loop Model ◽  
Electrostatic Actuator ◽  
Actuator System ◽  
Fixed Electrode ◽  
Harmonic Voltage ◽  
Micro Cantilever

A voltage regulator is developed to extend the operation range of a electrostatic actuator using a displacement feedback. The feedback actuator system can be used for continuous position tracking of step, ramp, or harmonic voltage signals. The electrostatic actuator is composed of a micro-cantilever beam electrode above a fixed electrode. The voltage difference between the two electrodes is regulated by the controller to maintain the balance between mechanical and electrostatic forces at large beam deflections, thereby increasing the actuation range. Simulated closed loop system responses with experimentally identified parameters are presented and show the actuation can reach up to 85% of the gap in the static response with an input voltage of less than 12 V. Experimental results show that the controller properly functions and prevents the beam from experiencing pull-in. A close agreement is found between the simulated and measured closed loop model dynamic responses.

scholarly journals DESIGN AND SIMULATION ANALYSIS OF AN ELECTROSTATIC ACTUATOR FOR IMPROVING THE PERFORMANCE OF SCANNING PROBE NANOLITHOGRAPHY

2017 ◽  
Vol 55 (4) ◽  
pp. 484
Author(s):  
Le Van Tam ◽  
Dang Van Hieu ◽  
Nguyen Duy Vy ◽  
Vu Ngoc Hung ◽  
Chu Manh Hoang
Keyword(s):  
Finite Element Method ◽  
Simulation Analysis ◽  
Lateral Displacement ◽  
Operation Mode ◽  
Scanning Probe ◽  
Electrostatic Actuator ◽  
Fixed Electrode ◽  
Square Plate ◽  
Operation Characteristics ◽  
Air Medium

In this paper, we design and simulate a micro-suspension based scanning probe for nanolithography using electrostatic actuation. The probe consists of a square plate with a pyramid tip at the center that is suspended by four beams. The entire probe is made of single silicon and is operated in air medium. Operation characteristics are analyzed by finite element method. The operation mode is symmetrical that overcomes the lateral displacement in the unsymmetrical operation mode of conventional scanning probe nanolithography, hence increasing the precision in lithographed nanostructures. The effect of electric field fringe and fixed electrode to the operation of the scanning probe are also analyzed in detail.

On the Driving Mechanism Design for Large Amplitude Electrostatic Actuation

2001 ◽  
Author(s):  
Jerwei Hsieh ◽  
Chien-Cheng Chu ◽  
Weileun Fang
Keyword(s):  
Mechanism Design ◽  
Large Amplitude ◽  
Driving Force ◽  
Driving Mechanism ◽  
Driving Voltage ◽  
Vibration System ◽  
Electrostatic Actuator ◽  
Output Amplitude ◽  
Actuator Design ◽  
Amplitude Amplification

Abstract This study intends to improve the performances of conventional electrostatic actuator regarding its amplitude and driving force. Two approaches including the oblique-comb actuator design and 2-DOF vibration system for amplitude amplification are proposed. The former has advantages in both generated force and allowable stroke, while the latter has the nature of larger output amplitude driven by smaller input stroke. Base on the advantages of both methods, the combination of these two designs can further improve the performance regarding output amplitude and driving voltage.

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