Optimization for MEMS Filter to Reduce Feed-Through and an Analysis Method Based on Polar Diagram
Keyword(s):
Rf Mems
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This paper presents an optimization of polysilicon based RF MEMS filter to improve electric isolation and minimize the feed-through, raising the stop-band reject above 20 dB from the original 0.2 dB, and proposes a performance analysis methodology based on polar diagram, which could simplify and visualize the analysis. Intrinsic feed-through of the device is minimized by optimization of substrate in fabrication process, differing from the characterization method reported previously, which is simple and effective.
2018 ◽
Vol 452
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pp. 042129
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pp. 1-14
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