Design on Ultrahigh Vacuum System with Titanium Pump

2013 ◽  
Vol 702 ◽  
pp. 286-290
Author(s):  
Jin Hua Zheng ◽  
Yun Feng Chao ◽  
Chong Zhang ◽  
Cong Hui Li
Keyword(s):  
Ultrahigh Vacuum ◽  
Horizontal Cylinder ◽  
Vacuum System ◽  
Measuring Instruments ◽  
Vane Pump ◽  
Optimization Analysis ◽  
Diffusion Pump ◽  
Rotary Vane Pump ◽  
Initiation Pressure ◽  
Strength And Stiffness

In order to meet the further requirements that study diamond-like carbon (DLC) films as rigid protective coating, a three-stage ultrahigh vacuum system composed of rotary vane pump and diffusion pump in parallel with TSP ( titanium sublimation pump) was designed mainly for getting limiting vacuum of 1.0×10-6Pa within 30 minutes in the vacuum chamber of about 0.23m3. The chamber is a horizontal cylinder supported by a saddle-shaped bracket and it has been proved to satisfy the requirements of strength and stiffness, it can be easy to get ultrahigh vacuum by TSP. Initiation pressure of the TSP was set to 10-3Pa vacuum after optimization analysis and the diffusion pump simultaneously was closed for the proper use. The system can be used as deposition equipment with the assistance of high and low vacuum measuring instruments and other accessories.

Design on High Vacuum System with Molecular Pump

2012 ◽  
Vol 220-223 ◽  
pp. 459-462 ◽  
Author(s):  
Chong Zhang ◽  
Jin Hua Zheng ◽  
Cong Hui Li ◽  
Yun Feng Chao ◽  
Long Jun Li ◽  
...  
Keyword(s):  
Molecular Sieve ◽  
Vacuum Chamber ◽  
High Vacuum ◽  
Vacuum System ◽  
Measuring Instruments ◽  
Vane Pump ◽  
Two Stage ◽  
Rotary Vane Pump

This paper aimed at finishing a two-stage oil-free high-vacuum system using a molecular pump as the main pump and a rotary vane pump as the backing pump. Before the pump’s inlet, there is a molecular sieve. With the assistance of the high and low vacuum measuring instruments and other accessories, the system can achieve limiting vacuum of 5×10-5Pa in the vacuum chamber whose volume is 0.085m3 and provide the high vacuum needed for vacuum coating equipments whose magnitude is 100mm.

Design on UHV System with TSP

2013 ◽  
Vol 310 ◽  
pp. 319-322
Author(s):  
Jin Hua Zheng ◽  
Cong Hui Li ◽  
Chong Zhang ◽  
Yun Feng Chao
Keyword(s):  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Normal Operation ◽  
Vacuum System ◽  
Measuring Instruments ◽  
Total Flow ◽  
Vane Pump ◽  
Rotary Vane Pump ◽  
The One

A UHV(ultra-high vacuum) system, which used as deposition equipment with the assistance of high and low vacuum measuring instruments and other accessories, was designed in this paper. A CMP (composite molecular pump) in parallel with TSP (titanium sublimation pump) as the main pump and a rotary-vane pump as the backing pump were designed in this system. After a CMP with displacement 2300l/s was chosen as the one of the main pumps, the total flow conductance between the outlet of vacuum chamber and the CMP was 1344l/s. The rough pump-down time was approximate 5 min by using a rotary-vane pump with pumping speeds 15l/s. In order to ensure the normal operation of the main pumps, a water chilling unit was designed in the system, which can achieve limiting vacuum of 5×10-6Pa in the vacuum chamber of 0.2 m3.

scholarly journals Ultrahigh Vacuum System Composed of an Oil Diffusion Pump and a Sorption Pump

Shinku ◽  
1962 ◽  
Vol 5 (9) ◽  
pp. 367-370
Author(s):  
Hikaru ARATA ◽  
Zenjiro ODA
Keyword(s):  
Ultrahigh Vacuum ◽  
Vacuum System ◽  
Diffusion Pump

Vacuum System to Minimize the Specimen Contamination of High-Performance EM

1977 ◽  
Vol 35 ◽  
pp. 68-69
Author(s):  
N. Yoshimura ◽  
K. Shirota ◽  
T. Etoh
Keyword(s):  
Electron Microscope ◽  
High Speed ◽  
High Performance ◽  
High Vacuum ◽  
Vacuum System ◽  
Pump System ◽  
Pumping System ◽  
Diffusion Pump ◽  
Almost All ◽  
Cascade Type

One of the most important requirements for a high-performance EM, especially an analytical EM using a fine beam probe, is to prevent specimen contamination by providing a clean high vacuum in the vicinity of the specimen. However, in almost all commercial EMs, the pressure in the vicinity of the specimen under observation is usually more than ten times higher than the pressure measured at the punping line. The EM column inevitably requires the use of greased Viton O-rings for fine movement, and specimens and films need to be exchanged frequently and several attachments may also be exchanged. For these reasons, a high speed pumping system, as well as a clean vacuum system, is now required. A newly developed electron microscope, the JEM-100CX features clean high vacuum in the vicinity of the specimen, realized by the use of a CASCADE type diffusion pump system which has been essentially improved over its predeces- sorD employed on the JEM-100C.

A Freeze Shadow Technique for the Preparation of Soft Paint Latexes for Electron Microscopy

1977 ◽  
Vol 35 ◽  
pp. 314-315
Author(s):  
Earl R. Walter ◽  
Glen H. Bryant
Keyword(s):  
Sample Preparation ◽  
High Vacuum ◽  
Vacuum System ◽  
Latex Particles ◽  
New Methods ◽  
Diffusion Pump ◽  
Film Forming ◽  
Routine Basis ◽  
Distribution Studies ◽  
Preparation Techniques

With the development of soft, film forming latexes for use in paints and other coatings applications, it became desirable to develop new methods of sample preparation for latex particle size distribution studies with the electron microscope. Conventional latex sample preparation techniques were inadequate due to the pronounced tendency of these new soft latex particles to distort, flatten and fuse on the substrate when they dried. In order to avoid these complications and obtain electron micrographs of undistorted latex particles of soft resins, a freeze-dry, cold shadowing technique was developed. The method has now been used in our laboratory on a routine basis for several years.The cold shadowing is done in a specially constructed vacuum system, having a conventional mechanical fore pump and oil diffusion pump supplying vacuum. The system incorporates bellows type high vacuum valves to permit a prepump cycle and opening of the shadowing chamber without shutting down the oil diffusion pump. A baffeled sorption trap isolates the shadowing chamber from the pumps.

An all-metal bakeable ultrahigh vacuum system for nucleation studies

Vacuum ◽  
1968 ◽  
Vol 18 (12) ◽  
pp. 641-644 ◽  
Author(s):  
JL Robins ◽  
VNE Robinson
Keyword(s):  
Ultrahigh Vacuum ◽  
Vacuum System
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