Design and Optimization Analysis of a Novel MEMS Micro-Hotplate for Gas Sensor

2013 ◽  
Vol 791-793 ◽  
pp. 1014-1017
Author(s):  
Xiao Bo Zhang ◽  
Chang Bai Liu ◽  
Li Liu ◽  
Yue He ◽  
Lian Yuan Wang
Keyword(s):  
Magnetic Field ◽  
Gas Sensor ◽  
Si Substrate ◽  
Electrode Structure ◽  
Optimization Analysis ◽  
Design And Optimization ◽  
Sensor Performance ◽  
Measurement Signal ◽  
Electrode Space ◽  
Higher Temperature

The paper presents a novel Si-substrated micro-hotplate for gas sensor. Use platinum filament as heater, SiO2 as thermal and electricity insulation. Through optimizing analysis, in order to make the gas sensor obtain perfect properties of higher temperature and uniform temperature distribution, the thickness of SiO2, thickness of Si substrate, electrode width and electrode space are designed to be 50, 250, 20 and 500 μm, respectively. Via the analysis of magnetic field distribution of the new gas sensor, the new electrode structure can eliminate the interference on the measurement signal from magnetic field, which is benefit for the improvement of sensor performance.

Design and Analysis of a New Electrode for Micro-Structure Gas Sensor

2013 ◽  
Vol 397-400 ◽  
pp. 1617-1620
Author(s):  
Chang Bai Liu ◽  
Ke Bi ◽  
Xiao Bo Zhang
Keyword(s):  
Magnetic Field ◽  
Temperature Distribution ◽  
Gas Sensor ◽  
Measuring Electrode ◽  
Micro Structure ◽  
Electrode Structure ◽  
Sensor Performance ◽  
Measurement Signal ◽  
Electrode Space ◽  
The Magnetic Field

A novel electrode structure is designed. Through the analysis of the temperature distribution of the gas sensor, the micro-structure gas sensor owns the best temperature distribution when the heating width, measuring electrode width and electrode space are designed to be 50, 20 and 500 μm, respectively. Through the simulation of the magnetic field, the new electrode can eliminate the interference from magnetic field on the measurement signal, which is beneficial to improve the sensor performance.

Design, Simulation and Optimization of a New Micro-Structural Gas Sensor

2013 ◽  
Vol 677 ◽  
pp. 125-129
Author(s):  
Xiao Bo Zhang ◽  
Chang Bai Liu ◽  
Li Liu ◽  
Hao Shan ◽  
Lian Yuan Wang ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Gas Sensor ◽  
Signal Interference ◽  
Si Substrate ◽  
Simulation And Optimization ◽  
Sensor Performance ◽  
Electrode Space ◽  
Higher Temperature ◽  
Measuring Signal ◽  
The Magnetic Field

Micro-structural gas sensor with a new kind of electrode is designed. Platinum filament is selected as gold electrodes, and SiO2 is used as the thermal and electricity insulation layer. The simulation results of ANSYS reveal that when the thickness of SiO2, thickness of Si substrate, electrode with and electrode space are 50, 250, 15 and 60 µm, respectively, the sensors can own higher temperature and uniform temperature distributing in the center. The magnetic field distribution is also analyzed by ANSYS, and the results show that the new electrodes can eliminate magnetic field from the heater on the measuring signal interference, which is benefit for the improvement of sensor performance.

Design and Optimization of a New Micro-Hotplate for Gas Sensor

2013 ◽  
Vol 791-793 ◽  
pp. 1880-1883
Author(s):  
Guo Guang Wang ◽  
Xiao Bo Zhang ◽  
Chang Bai Liu ◽  
Li Liu
Keyword(s):  
Gas Sensor ◽  
Substrate Thickness ◽  
Measuring Electrode ◽  
Si Substrate ◽  
Element Analysis ◽  
Design And Optimization ◽  
Sensor Performance ◽  
Micro Gas Sensor ◽  
The Finite Element Analysis ◽  
Electrode Space

This paper reports on the optimization of a novel micro-hotplate with three pins designed for micro-structural gas sensor. The temperature distribution of the Si-substrated micro gas sensor was simulated and analyzed by the finite element analysis (FEA) tool ANSYS. In order to make the gas sensor obtain perfect properties of good temperature uniformity, the thickness of Si substrate, thickness of the front and rear SiO2, measuring electrode width and electrode space were designed to be 150, 50,100, 20 and 500 μm, respectively. The new micro-structural gas sensor is benefit for the improvement of sensor performance.

Optimization of a Novel Micro-Hotplate for Gas Sensor

2013 ◽  
Vol 423-426 ◽  
pp. 2317-2320
Author(s):  
Chang Chun Li ◽  
Xiao Bo Zhang ◽  
Li Liu
Keyword(s):  
Temperature Distribution ◽  
Gas Sensor ◽  
Uniform Temperature ◽  
Si Substrate ◽  
Uniform Temperature Distribution ◽  
Sensor Sensitivity ◽  
Electrode Space ◽  
Higher Temperature ◽  
Simulation Results ◽  
Novel Design

A novel design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO2, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 230 μm, respectively. The new micro-hotplate is benefit for the improvement of sensor sensitivity.

Optimizing Design of a New Micro-Structural Gas Sensor

2013 ◽  
Vol 712-715 ◽  
pp. 1914-1917
Author(s):  
Chang Bai Liu ◽  
Xiao Bo Zhang ◽  
Li Liu ◽  
Jin Bao Zhang ◽  
Shou Chun Li ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Temperature Distribution ◽  
Gas Sensor ◽  
Signal Interference ◽  
Analysis Tool ◽  
Element Analysis ◽  
Measurement Signal ◽  
Optimizing Design ◽  
Electrode Space ◽  
The Magnetic Field

A new kind of electrode was designed for micro-structural gas sensor based on silicon substrate. The temperature distribution was simulated by means of finite element analysis tool ANSYS, in order to obtain higher temperature and uniform temperature distribution in the micro-gas sensor, the thickness of SiO2, thickness of Si substrate, electrode width and electrode space is designed to be 50, 250, 10 and 350 µm, respectively. The magnetic field distribution was also analyzed by ANSYS, and the results show that the new electrodes can eliminate the magnetic field from the heater on the measurement signal interference, which is benefit for the improvement of sensor performance.

A Novel Micro-Hotplate Designed for Micro-Gas Sensor

2013 ◽  
Vol 411-414 ◽  
pp. 1569-1572
Author(s):  
Ji Li ◽  
Xiao Bo Zhang ◽  
Li Liu
Keyword(s):  
Temperature Distribution ◽  
Gas Sensor ◽  
Uniform Temperature ◽  
Si Substrate ◽  
Original Design ◽  
Uniform Temperature Distribution ◽  
Micro Gas Sensor ◽  
Electrode Space ◽  
Higher Temperature ◽  
Simulation Results

A original design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO2, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 250 μm, respectively. The new micro-hotplate is beneficial to improving the sensor sensitivity.

High gas sensor performance of WO3 nanofibers prepared by electrospinning

2021 ◽  
Vol 864 ◽  
pp. 158745
Author(s):  
Paulo V. Morais ◽  
Pedro H. Suman ◽  
Ranilson A. Silva ◽  
Marcelo O. Orlandi
Keyword(s):  
Gas Sensor ◽  
Sensor Performance

Preliminary Core Design and Optimization Analysis of Travelling Wave Reactor

2014 ◽  
Vol 1070-1072 ◽  
pp. 357-360
Author(s):  
Dao Xiang Shen ◽  
Yao Li Zhang ◽  
Qi Xun Guo
Keyword(s):  
Monte Carlo ◽  
Rational Design ◽  
Nuclear Reactor ◽  
Reactor Core ◽  
Travelling Wave ◽  
Optimization Analysis ◽  
Design And Optimization ◽  
Uranium Fuel ◽  
Enriched Uranium ◽  
Ignition Zone

A travelling wave reactor (TWR) is an advanced nuclear reactor which is capable of running for decades given only depleted uranium fuel, it is considered one of the most promising solutions for nonproliferation. A preliminary core design was proposed in this paper. The calculation was performed by Monte Carlo method. The burning mechanism of the reactor core design was studied. Optimization on the ignition zone was performed to reduce the amount of enriched uranium initially deployed. The results showed that the preliminary core design was feasible. The optimization analysis showed that the amount of enriched uranium could be reduced under rational design.

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