Controlled Deposition and Electrical Characterization of Multi-Wall Carbon Nanotubes

2008 ◽  
Vol 3 ◽  
pp. 25-32 ◽  
Author(s):  
S.A. Moshkalev ◽  
J. Leon ◽  
Carla Veríssimo ◽  
A.R. Vaz ◽  
A. Flacker ◽  
...  

A method of ac dielectrophoresis was applied to align and deposit metallic multi-wall carbon nanotubes between pre-fabricated metal (Au, Pd) electrodes with a micron scale separation. For improvement of nanotube contacts with electrodes, Ni and Pd electroless processes were developed, and significant reduction of 2 terminals resistances was demonstrated. Further, using electron and ion beam deposited Pt contacts in two different configurations (“Pt-on-CNT” and “CNT-on-Pt”), 4 terminals measurements have been performed to evaluate intrinsic nanotube resistances. The values between 90 and 130 kΩ/μm were obtained, while systematically lower values (30-70 kΩ/μm) were estimated using 2 terminals method. The 4 terminals method was applied to study the effect of ion irradiation on the electrical parameters of supported nanotubes.

Author(s):  
E. Hendarto ◽  
S.L. Toh ◽  
J. Sudijono ◽  
P.K. Tan ◽  
H. Tan ◽  
...  

Abstract The scanning electron microscope (SEM) based nanoprobing technique has established itself as an indispensable failure analysis (FA) technique as technology nodes continue to shrink according to Moore's Law. Although it has its share of disadvantages, SEM-based nanoprobing is often preferred because of its advantages over other FA techniques such as focused ion beam in fault isolation. This paper presents the effectiveness of the nanoprobing technique in isolating nanoscale defects in three different cases in sub-100 nm devices: soft-fail defect caused by asymmetrical nickel silicide (NiSi) formation, hard-fail defect caused by abnormal NiSi formation leading to contact-poly short, and isolation of resistive contact in a large electrical test structure. Results suggest that the SEM based nanoprobing technique is particularly useful in identifying causes of soft-fails and plays a very important role in investigating the cause of hard-fails and improving device yield.


Nano Letters ◽  
2007 ◽  
Vol 7 (4) ◽  
pp. 1086-1090 ◽  
Author(s):  
Paul Rice ◽  
T. Mitch Wallis ◽  
Stephen E. Russek ◽  
Pavel Kabos

1996 ◽  
Vol 438 ◽  
Author(s):  
H. Shibata ◽  
S. Kimura ◽  
P. Fons ◽  
A. Yamada ◽  
Y. Makita ◽  
...  

AbstractA combined ion beam and molecular beam epitaxy (CIBMBE) method was applied for the deposition of a Ge1-xCx alloy on Si(100) using a low-energy ( 50 – 100 eV ) C+ ion beam and a Ge molecular beam. Metastable Ge1-xCx solid solutions were formed up to x = 0.047, and the CIBMBE method was shown to have a very high potential to grow metastable Ge1-x,Cx alloys. It was also revealed that the sticking coefficient of C+ ions into Ge was ∼28% for Ei, = 100 eV and ∼18% for Ei = 50 eV. Structural characterization suggests that the deposited films are single crystals grown epitaxially on the substrate with twins on {111} planes. Characterization of lattice dynamics using Raman spectroscopy suggested that the deposited layers have a small amount of ion irradiation damage.


Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 717 ◽  
Author(s):  
Wenbo Xin ◽  
Joseph Severino ◽  
Arie Venkert ◽  
Hang Yu ◽  
Daniel Knorr ◽  
...  

In this report, networks of carbon nanotubes (CNTs) are transformed into composite yarns by infusion, mechanical consolidation and polymerization of dicyclopentadiene (DCPD). The microstructures of the CNT yarn and its composite are characterized by scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM), and a focused ion beam used for cross-sectioning. Pristine yarns have tensile strength, modulus and elongation at failure of 0.8 GPa, 14 GPa and 14.0%, respectively. In the composite yarn, these values are significantly enhanced to 1.2 GPa, 68 GPa and 3.4%, respectively. Owing to the consolidation and alignment improvement, its electrical conductivity was increased from 1.0 × 105 S/m (raw yarn) to 5.0 × 105 S/m and 5.3 × 105 S/m for twisted yarn and composite yarn, respectively. The strengthening mechanism is attributed to the binding of the DCPD polymer, which acts as a capstan and increases frictional forces within the nanotube bundles, making it more difficult to pull them apart.


Carbon ◽  
2003 ◽  
Vol 41 (9) ◽  
pp. 1851-1854 ◽  
Author(s):  
Weizhong Qian ◽  
Tang Liu ◽  
Fei Wei ◽  
Haiyan Yuan

2001 ◽  
Vol 353-356 ◽  
pp. 591-594
Author(s):  
C. Serre ◽  
D. Panknin ◽  
A. Pérez-Rodríguez ◽  
A. Romano-Rodríguez ◽  
J.R. Morante ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document