Nondestructive Evaluation of CVD Diamond Coating Layers Using the Leaky Rayleigh Surface Wave

Chemical vapor deposit (CVD) diamond coating layer is expected to extend the lifetime of mechanical parts that are used severely abrasive conditions. However, one of the most severe problems is that the delamination between the CVD diamond coating layer and the silicon substrate occurs frequently due to large difference in the material properties. Therefore, the nondestructive evaluation of adhesive property of CVD diamond coating layer is needed. To address such a need, back-scattered Rayleigh surface wave is currently applied. However, the interpretation of the acquired signal is not easy at all. To take care of such a difficulty, we proposed the time trace angular scan (TTAS) plot and the frequency spectrum angular scan (FSAS) plot that can make possible of the systematic interpretation of the back-scattered signals from the diamond coating layer. In this paper, the concept of the TTAS and FSAS plots and the experimental results presented to demonstrate the effectiveness of the proposed approach.