Mechanical Behavior Simulation of PMMA for Nano Imprint Lithography Using Molecular Dynamics

2007 ◽  
Vol 345-346 ◽  
pp. 979-982 ◽  
Author(s):  
Jung Yup Kim ◽  
Jae Hyun Kim ◽  
Byung Ik Choi

NIL(Nano Imprint Lithography) is one of the most promising lithography techniques. There are many variants of NIL, and two major techniques of them are thermal NIL and UV NIL. Here, we focus ourselves on the thermal NIL. During the thermal NIL, the polymeric patterns experience large mechanical strain and high temperature, and this often leads to malformation of polymeric patterns. So it is needed to improve the pattern fidelity and contrast, and these are believed to be closely related to the process condition and mechanical properties. In thermal NIL, PMMA is widely used and chosen as target polymer. Generally, mechanical properties in nano scale are really hard to acquire. In this study, we estimate the mechanical properties of PMMA by molecular dynamic simulation. These properties will be used as input of continuum simulation. We will estimate stress-strain relationship of PMMA. This stress-strain relationship depends on strain rate and temperature. So we will study about strain rate and temperature effect.

Materials ◽  
2021 ◽  
Vol 14 (20) ◽  
pp. 6206
Author(s):  
Qian Guo ◽  
Wenbin Li ◽  
Wenjin Yao ◽  
Xiaoming Wang ◽  
Changqiang Huang

In this work, quasistatic mechanical compression experiments were used to study the stress–strain relationship of aluminum foam, and the mechanism of the compressive deformation of aluminum foam under quasistatic compression conditions is discussed based on the experimental observations. Since the interactions among cells of the aluminum foam and differences in compressive strength among cells substantially impacted the mechanical properties of the material, the cellular structural parameters, namely the cell size and cell wall thickness, were defined. Along with the mechanism of deformation of a single cell, the influence of structural parameters on the micro failure mechanism and the stress–strain relationship of the aluminum foam material was analyzed. In combination with the factors influencing the mechanical properties of the aluminum foam, a mechanical constitutive model of aluminum foam suitable for multi-density and multi-impact environments that considers cellular structure density was established to predict the complete stress–strain relationship of aluminum foam under a high strain rate. The coupling function of strain rate and temperature in the original model was verified and the parameters were determined by the compression experiments under different strain rates and different temperatures.


2010 ◽  
Vol 152-153 ◽  
pp. 1213-1216
Author(s):  
Wen Huang ◽  
Zhong Wei Huang

A statistical constitutive model, which takes account the effect of strain rate, was presented to describe the stress-strain relationship of brittle fiber bundles. To verify its reliability, tensile tests on two kinds of brittle fibers: glass fiber and SiC fiber, were carried out at different strain rates, and the stress-strain curves were obtained. It was found that the modulus E, the strength and the fracture strain of these fiber bundles all increase with increasing strain rate. The simulated stress-strain curves, derived from the constitutive model, fit the tested results well, which indicates that the model is valid and reliable.


2020 ◽  
Vol 194 ◽  
pp. 05024
Author(s):  
Yanan Tang ◽  
Weidong Song ◽  
Jianxin Fu

The mechanical properties and stress-strain relationship of cemented backfills with different stratified structure have a direct effect on the mining-filling cycle and the mining of adjacent pillars. To obtain the stress-strain evolution curves, the uniaxial compressive strength tests were performed on backfills with stratified numbers of 0, 1, 2 and 3. The deformation of stratified backfill under the compressive load is regarded as a compound of closed deformation of the macroscopic stratified structure and elastic deformation of material. The damage constitutive model of cemented backfills with different stratified structure are established by considering the influence of compacted section. Comparative analysis reveals that the calculated curve based on the established sectional damage constitutive model conforms well to the trial curve. The maximum closed strain of the structural plane has a more significant effect on the mechanical properties of backfill. In the Weibull distribution, with the increase of the parameter m, the peak strength of backfill gradually increases and then reaches to a certain value, and the stress-strain curve gradually becomes steeper, which shows that m is a reflection of the concentration level of micro-unit strength distribution in the backfill..


2003 ◽  
Vol 18 (9) ◽  
pp. 2068-2078 ◽  
Author(s):  
A. DiCarlo ◽  
H. T. Y. Yang ◽  
S. Chandrasekar

A method for determining the stress–strain relationship of a material from hardness values H obtained from cone indentation tests with various apical angles is presented. The materials studied were assumed to exhibit power-law hardening. As a result, the properties of importance are the Young's modulus E, yield strength Y, and the work-hardening exponent n. Previous work [W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992)] showed that E can be determined from initial force–displacement data collected while unloading the indenter from the material. Consequently, the properties that need to be determined are Y and n. Dimensional analysis was used to generalize H/E so that it was a function of Y/E and n [Y-T. Cheng and C-M. Cheng, J. Appl. Phys. 84, 1284 (1999); Philos. Mag. Lett. 77, 39 (1998)]. A parametric study of Y/E and n was conducted using the finite element method to model material behavior. Regression analysis was used to correlate the H/E findings from the simulations to Y/E and n. With the a priori knowledge of E, this correlation was used to estimate Y and n.


2004 ◽  
Vol 274-276 ◽  
pp. 241-246 ◽  
Author(s):  
Bo Han ◽  
Hong Jian Liao ◽  
Wuchuan Pu ◽  
Zheng Hua Xiao

Author(s):  
Zengle Li ◽  
Bin Zhi ◽  
Enlong Liu

In response to the major challenges faced by China’s transition to green low-carbon energy under the dual-carbon goal, the use of energy Internet cross-boundary thinking will help to develop research on the integration of renewable clean energy and buildings. Energy piles are a new building-energy-saving technology that uses geothermal energy in the shallow soil of the Earth’s surface as a source of cold (heat) to achieve heating in winter and cooling in summer. It is a complex thermomechanical working process that changes the temperature of the rock and soil around the pile, and the temperature change significantly influences the mechanical properties of natural loess. Although the soil temperature can be easily and quickly obtained by using sensors connected to the Internet of Things, the mechanical properties of natural loess will change greatly under the influence of temperature. To explore the influence of temperature on the stress–strain relationship of structural loess, the undrained triaxial consolidation tests were carried out under different temperatures (5, 20, 50 and 70∘C) and different confining pressures (50, 100, 200 and 400[Formula: see text]kPa), and a binary-medium model was introduced to simulate the stress–strain relationship. By introducing the damage rate under temperature change conditions, a binary-medium model of structural loess under variable temperature conditions was established, and the calculation method of the model parameters was proposed. Finally, the calculated results were compared with the test results. The calculation results showed that the established model has good applicability.


2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Hongbo Zhao ◽  
Zenghui Huang ◽  
Zhengsheng Zou

Stress-strain relationship of geomaterials is important to numerical analysis in geotechnical engineering. It is difficult to be represented by conventional constitutive model accurately. Artificial neural network (ANN) has been proposed as a more effective approach to represent this complex and nonlinear relationship, but ANN itself still has some limitations that restrict the applicability of the method. In this paper, an alternative method, support vector machine (SVM), is proposed to simulate this type of complex constitutive relationship. The SVM model can overcome the limitations of ANN model while still processing the advantages over the traditional model. The application examples show that it is an effective and accurate modeling approach for stress-strain relationship representation for geomaterials.


Sign in / Sign up

Export Citation Format

Share Document