Fabrication and Characterization of 4H-SiC Planar MESFET Using Ion- Implantation

2004 ◽  
Vol 457-460 ◽  
pp. 1181-1184 ◽  
Author(s):  
Hoon Joo Na ◽  
Dae Hwan Kim ◽  
Sang Yong Jung ◽  
In Bok Song ◽  
Myung Yoon Um ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Fabrication And Characterization

Fabrication and Characterization of 3.3-kV SiC DMOSFET with Self-Aligned Channels Formed by Tilted Ion Implantation

2019 ◽  
Vol 963 ◽  
pp. 390-393
Author(s):  
Takahiro Morikawa ◽  
Shintaroh Sato ◽  
Akio Shima
Keyword(s):  
Ion Implantation ◽  
Threshold Voltage ◽  
Experimental Results ◽  
Channel Formation ◽  
Electrical Measurements ◽  
Blocking Voltage ◽  
Fabrication And Characterization ◽  
State Resistance

SiC DMOSFET with self-aligned channels was fabricated and characterized. The process features self-aligned channel formation by utilizing tilted ion implantation. We confirmed that channel areas were successfully formed along both sides of the stripe cell. Electrical measurements revealed that the characteristics of the fabricated DMOSFET chips had sufficiently high blocking voltage and moderate values of threshold voltage and on-state resistance. These experimental results show the proposed process can be an easy option for fabrication of SiC DMOSFET.

scholarly journals Fabrication and characterization of a co-planar detector in diamond for low energy single ion implantation

2016 ◽  
Vol 109 (6) ◽  
pp. 063502 ◽  
Author(s):  
J. B. S. Abraham ◽  
B. A. Aguirre ◽  
J. L. Pacheco ◽  
G. Vizkelethy ◽  
E. Bielejec
Keyword(s):  
Ion Implantation ◽  
Low Energy ◽  
Planar Detector ◽  
Fabrication And Characterization

Fabrication and characterization of Ge nanocrystalline growth by ion implantation in SiO2 matrix

2007 ◽  
Vol 42 (18) ◽  
pp. 7757-7761 ◽  
Author(s):  
S. N. M. Mestanza ◽  
I. Doi ◽  
J. W. Swart ◽  
N. C. Frateschi
Keyword(s):  
Ion Implantation ◽  
Sio2 Matrix ◽  
Fabrication And Characterization

Fabrication and Characterization of Polyoxometalate based Nano-hybrids: Evaluation of their role in Biological Activity

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  
Keyword(s):  
Biological Activity ◽  
Fabrication And Characterization

Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa
Keyword(s):  
Tactile Sensing ◽  
Fabrication And Characterization

Fabrication and Characterization of Chain-like Arrangement of Gold Nanoparticles using Nanotemplates

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata
Keyword(s):  
Gold Nanoparticles ◽  
Fabrication And Characterization
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