Fabrication of Iron Oxide Nanostructures by Electron Beam-Induced Deposition

2007 ◽  
Vol 561-565 ◽  
pp. 1101-1104 ◽  
Author(s):  
Masayuki Shimojo ◽  
Masaki Takeguchi ◽  
Kazutaka Mitsuishi ◽  
M. Tanaka ◽  
Kazuo Furuya
Keyword(s):  
Electron Beam ◽  
Iron Pentacarbonyl ◽  
Promising Technique ◽  
Carbon Reduction ◽  
Reduction Techniques ◽  
Oxide Nanostructures ◽  
Electron Beam Induced Deposition ◽  
Size Controlled ◽  
Post Deposition ◽  
Iron Oxide Nanostructures

Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.

Fabrication of Iron Oxide Nanostructures by Electron Beam-Induced Deposition

2007 ◽  
pp. 1101-1104
Author(s):  
Masayuki Shimojo ◽  
Masaki Takeguchi ◽  
Kazutaka Mitsuishi ◽  
M. Tanaka ◽  
Kazuo Furuya
Keyword(s):  
Electron Beam ◽  
Iron Oxide ◽  
Oxide Nanostructures ◽  
Electron Beam Induced Deposition ◽  
Iron Oxide Nanostructures

Top-down meets bottom-up — Electron-beam induced metalorganic deposition of amorphous iron oxide nanostructures

2009 ◽  
Vol 87 (1) ◽  
pp. 217-223 ◽  
Author(s):  
Simon Trudel ◽  
Ross H Hill
Keyword(s):  
Electron Beam ◽  
Iron Oxide ◽  
Single Point ◽  
Exposure Dose ◽  
Free Standing ◽  
Amorphous Iron ◽  
X Ray ◽  
Oxide Nanostructures ◽  
Metalorganic Deposition ◽  
Iron Oxide Nanostructures

We present the use of a metalorganic precursor, iron(III) 2-ethylhexanoate, as a precursor for the electron-beam induced deposition of amorphous iron oxide nanostructures. Exposing this precursor to an area dose of 1.560 mC/cm2 with 10 keV electrons affords a material that can be developed and was determined to be amorphous iron oxide when examined by TEM, electron diffraction, and energy dispersive X-ray spectroscopy. Single point exposure yields free-standing hollow nanorods with diameters from 85 to 255 nm controlled by the exposure dose. The patterning of sub 40 nm nanowires with low (<3 nm) line edge and width roughnesses is also presented.Key words: electron beam lithography, amorphous iron oxide, nanotubes, nanowires, coordination polymer precursor.

scholarly journals Electron-beam induced deposition and autocatalytic decomposition of Co(CO)3NO

2014 ◽  
Vol 5 ◽  
pp. 1175-1185 ◽  
Author(s):  
Florian Vollnhals ◽  
Martin Drost ◽  
Fan Tu ◽  
Esther Carrasco ◽  
Andreas Späth ◽  
...  
Keyword(s):  
Electron Beam ◽  
Iron Pentacarbonyl ◽  
X Ray ◽  
Nexafs Spectroscopy ◽  
Novel Approach ◽  
Scanning Transmission ◽  
Layered Nanostructures ◽  
Electron Beam Induced Deposition ◽  
Autocatalytic Growth ◽  
Seed Layers

The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)5, and cobalt tricarbonyl nitrosyl, Co(CO)3NO. Different deposits are prepared on silicon nitride membranes and silicon wafers under ultrahigh vacuum conditions, and are studied by scanning electron microscopy (SEM) and scanning transmission X-ray microscopy (STXM), including near edge X-ray absorption fine structure (NEXAFS) spectroscopy. It has previously been shown that Fe(CO)5 decomposes autocatalytically on Fe seed layers (EBID) and on certain electron beam-activated surfaces, yielding high purity, polycrystalline Fe nanostructures. In this contribution, we investigate the growth of structures from Co(CO)3NO and compare it to results obtained from Fe(CO)5. Co(CO)3NO exhibits autocatalytic growth on Co-containing seed layers prepared by EBID using the same precursor. The growth yields granular, oxygen-, carbon- and nitrogen-containing deposits. In contrast to Fe(CO)5 no decomposition on electron beam-activated surfaces is observed. In addition, we show that the autocatalytic growth of nanostructures from Co(CO)3NO can also be initiated by an Fe seed layer, which presents a novel approach to the fabrication of layered nanostructures.

scholarly journals Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

2015 ◽  
Vol 6 ◽  
pp. 907-918 ◽  
Author(s):  
Brett B Lewis ◽  
Michael G Stanford ◽  
Jason D Fowlkes ◽  
Kevin Lester ◽  
Harald Plank ◽  
...  
Keyword(s):  
Electron Beam ◽  
Energy Loss ◽  
Electron Energy ◽  
Oxygen Concentration ◽  
Carbon Nanostructures ◽  
Shape Retention ◽  
Electron Beam Induced Deposition ◽  
Isotropic Carbon ◽  
Electron Energy Loss ◽  
Post Deposition

Platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.

Generation of Clean Iron Structures by Electron-Beam-Induced Deposition and Selective Catalytic Decomposition of Iron Pentacarbonyl on Rh(110)

Langmuir ◽  
2009 ◽  
Vol 25 (19) ◽  
pp. 11930-11939 ◽  
Author(s):  
Thomas Lukasczyk ◽  
Michael Schirmer ◽  
Hans-Peter Steinrück ◽  
Hubertus Marbach
Keyword(s):  
Electron Beam ◽  
Catalytic Decomposition ◽  
Iron Pentacarbonyl ◽  
Electron Beam Induced Deposition
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