Contrast of Basal Plane and Threading Edge Dislocations in 4H-SiC by X-Ray Topography in Grazing Incidence Geometry

2008 ◽  
Vol 600-603 ◽  
pp. 321-324 ◽  
Author(s):  
Hirofumi Matsuhata ◽  
Hirotaka Yamaguchi ◽  
Ichiro Nagai ◽  
Toshiyuki Ohno ◽  
Ryouji Kosugi ◽  
...  
Keyword(s):  
Basal Plane ◽  
Grazing Incidence ◽  
Incidence Geometry ◽  
Burgers Vector ◽  
X Ray ◽  
Substrate Wafer ◽  
G 11 ◽  
Edge Dislocations ◽  
Grazing Incidence Geometry ◽  
Monochromatic Synchrotron

Dislocations in a substrate wafer of 4H-SiC with an epi-layer were observed using technique of monochromatic synchrotron X-ray topography in a grazing incidence geometry. Six different Burgers vectors of basal plane dislocations and threading edge dislocations were identified by changing the Bragg reflections, and by analysis of images of dislocation. We identify some relations of the Burgers vector and the dislocation contrast observed for g=11 2 8. Some of these relationships are discussed in this report.

Synchrotron X-Ray Topography Study on the Relationship between Local Basal Plane Bending and Basal Plane Dislocations in PVT-Grown 4H-SiC Substrate Wafers

2020 ◽  
Vol 1004 ◽  
pp. 393-400
Author(s):  
Tuerxun Ailihumaer ◽  
Hongyu Peng ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
Gilyong Chung ◽  
...  
Keyword(s):  
Basal Plane ◽  
Local Strain ◽  
Grazing Incidence ◽  
Peak Shift ◽  
Linear Mapping ◽  
Incidence Geometry ◽  
Convex Shape ◽  
X Ray ◽  
Black And White ◽  
Plane Bending

Synchrotron monochromatic beam X-ray topography (SMBXT) in grazing incidence geometry shows black and white contrast for basal plane dislocations (BPDs) with Burgers vectors of opposite signs as demonstrated using ray tracing simulations. The inhomogeneous distribution of these dislocations is associated with the concave/convex shape of the basal plane. Therefore, the distribution of these two BPD types were examined for several 6-inch diameter 4H-SiC substrates and the net BPD density distribution was used for evaluating the nature and magnitude of basal plane bending in these wafers. Results show different bending behaviors along the two radial directions - [110] and [100] directions, indicating the existence of non-isotropic bending. Linear mapping of the peak shift of the 0008 reflection along the two directions was carried out using HRXRD to correlate with the results from the SMBXT measurements. Basal-plane-tilt angle calculated using the net BPD density derived from SMBXT shows a good correlation with those obtained from HRXRD measurements, which further confirmed that bending in basal plane is caused by the non-uniform distribution of BPDs. Regions of severe bending were found to be associated with both large tilt angles (95% black contrast BPDs to 5% white contrast BPDs) and abrupt changes in a and c lattice parameters i.e. local strain.

Small angle X-Ray Scattering in Grazing Incidence Geometry

2012 ◽  
pp. 2435-2435
Author(s):  
Yimei Zhu ◽  
Hiromi Inada ◽  
Achim Hartschuh ◽  
Li Shi ◽  
Ada Della Pia ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Incidence Geometry ◽  
X Ray ◽  
X Ray Scattering ◽  
Grazing Incidence Geometry ◽  
Ray Scattering

scholarly journals Parametric x-ray radiation for the grazing incidence geometry

2010 ◽  
Author(s):  
I. D. Feranchuk ◽  
A. I. Benediktovitch ◽  
Remo Ruffini ◽  
Gregory Vereshchagin
Keyword(s):  
Grazing Incidence ◽  
Incidence Geometry ◽  
X Ray ◽  
Grazing Incidence Geometry

Stress in Aluminium Alloys Measured Using Göbel Mirror as a Primary Beam Optics of X-Ray Diffractometer

2011 ◽  
Vol 681 ◽  
pp. 393-398 ◽  
Author(s):  
Marianna Marciszko ◽  
Andrzej Baczmanski ◽  
Nacer Zazi ◽  
Jean Paul Chopart ◽  
Alain Lodini ◽  
...  
Keyword(s):  
Aluminium Alloys ◽  
Grazing Incidence ◽  
Peak Position ◽  
Thin Layers ◽  
Incidence Geometry ◽  
Primary Beam ◽  
Beam Optics ◽  
Surface Layers ◽  
X Ray ◽  
Grazing Incidence Geometry

Grazing incidence geometry, called MGID-sin2y, was applied to measure surface stresses in very thin layers (depth of a few mm) of Al-Mg alloy samples subjected to different thermal and mechanical treatments. The Göbel mirror was used to parallelize the incident X-ray beam. Perfect collimation of the beam significantly increases accuracy of determined peak position and consequently allows to measure low stresses in surface layers.

scholarly journals An X-ray harmonic separator for next-generation synchrotron X-ray sources and X-ray free-electron lasers

2018 ◽  
Vol 25 (2) ◽  
pp. 346-353 ◽  
Author(s):  
Ichiro Inoue ◽  
Taito Osaka ◽  
Kenji Tamasaku ◽  
Haruhiko Ohashi ◽  
Hiroshi Yamazaki ◽  
...  
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
Grazing Incidence ◽  
Incidence Geometry ◽  
Photon Flux ◽  
Free Electron Lasers ◽  
Undulator Radiation ◽  
X Ray ◽  
Grazing Incidence Geometry ◽  
Selection Of

An X-ray prism for the extraction of a specific harmonic of undulator radiation is proposed. By using the prism in a grazing incidence geometry, the beam axes of fundamental and harmonics of undulator radiation are separated with large angles over 10 µrad, which enables the selection of a specific harmonic with the help of apertures, while keeping a high photon flux. The concept of the harmonic separation was experimentally confirmed using X-ray beams from the X-ray free-electron laser SACLA.

scholarly journals Surface morphology smoothing of a 2 inch-diameter GaN homoepitaxial layer observed by X-ray diffraction topography

RSC Advances ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 1878-1882
Author(s):  
Jaemyung Kim ◽  
Okkyun Seo ◽  
Satoshi Hiroi ◽  
Yoshihiro Irokawa ◽  
Toshihide Nabatame ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Grazing Incidence ◽  
Incidence Geometry ◽  
X Ray Diffraction ◽  
Free Standing ◽  
X Ray ◽  
Grazing Incidence Geometry ◽  
Morphology Changes

We investigated the surface morphology changes in a 2 inch-diameter, c-plane, free-standing GaN wafer using X-ray diffraction topography in a grazing-incidence geometry.

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