Electrical Characteristics of Large Chip-Size 3.3 kV SiC-JBS Diodes

2013 ◽  
Vol 740-742 ◽  
pp. 881-886 ◽  
Author(s):  
Hiroyuki Okino ◽  
Norifumi Kameshiro ◽  
Kumiko Konishi ◽  
Naomi Inada ◽  
Kazuhiro Mochizuki ◽  
...  
Keyword(s):  
Electric Field ◽  
Schottky Barrier ◽  
Leakage Current ◽  
Reverse Current ◽  
Tunneling Current ◽  
Leakage Currents ◽  
Reverse Leakage Current ◽  
Low Leakage ◽  
Chip Size ◽  
Barrier Metal

The reduction of reverse leakage currents was attempted to fabricate 4H-SiC diodes with large current capacity for high voltage applications. Firstly diodes with Schottky metal of titanium (Ti) with active areas of 2.6 mm2 were fabricated to investigate the mechanisms of reverse leakage currents. The reverse current of a Ti Schottky barrier diode (SBD) is well explained by the tunneling current through the Schottky barrier. Then, the effects of Schottky barrier height and electric field on the reverse currents were investigated. The high Schottky barrier metal of nickel (Ni) effectively reduced the reverse leakage current to 2 x 10-3 times that of the Ti SBD. The suppression of the electric field at the Schottky junction by applying a junction barrier Schottky (JBS) structure reduced the reverse leakage current to 10-2 times that of the Ni SBD. JBS structure with high Schottky barrier metal of Ni was applied to fabricate large chip-size SiC diodes and we achieved 30 A- and 75 A-diodes with low leakage current and high breakdown voltage of 4 kV.

Schottky Barrier Formation and Long Term Stability of Metal/N-Lnp Interfaces

1992 ◽  
Vol 281 ◽  
Author(s):  
Z. Q. Shi ◽  
W. A. Anderson
Keyword(s):  
Schottky Barrier ◽  
Barrier Height ◽  
Leakage Current ◽  
Reverse Current ◽  
Testing Time ◽  
Forward Voltage ◽  
Term Stability ◽  
Long Term Stability ◽  
Reverse Leakage Current

ABSTRACTThe formation of reliable high barrier height Schottky contacts to n-InP is essential for useful device fabrication. Fermi-level pinning traditionally has restricted the application of InP due to large reverse leakage current. Recently, we have proposed the enhancement of Schottky barrier heights (up to 0.98 eV) by deposition with the substrate cooled to low temperature (LT=77K) rather than at room temperature (RT=300K). Studies of the resistance of thin metal films during deposition reveals significant differences in metal nucleation for RT and LT diodes. For the long term stability study, a reverse bias of 2.0V was applied to both RT and LT diodes for more than 1500 hours. Then a constant forward current of 20 mA/cm2 was applied to the diode. The reverse current and forward voltage were recorded as a function of the testing time. After each step the saturation current density (Jo), barrier height (øB), and ideality factor (n) were measured using the current-voltage (I-V) technique. For a LT Au/n-InP diode, the Jo, øB, and n factor were found to be 3.4 × 10−11 A/cm2, 0.98 eV, and 1.31 before testing, and 4.8 × 10−10 A/cm2, 0.92 eV, and 1.31 after testing. The reverse leakage current was nearly constant during the testing. The forward voltage showed a little drop with time. The ultra-high øB and good stability of the LT diodes will be discussed in terms of the interface modification.

Near-ideal reverse leakage current and practical maximum electric field in β-Ga2O3 Schottky barrier diodes

2020 ◽  
Vol 116 (19) ◽  
pp. 192101 ◽  
Author(s):  
Wenshen Li ◽  
Devansh Saraswat ◽  
Yaoyao Long ◽  
Kazuki Nomoto ◽  
Debdeep Jena ◽  
...  
Keyword(s):  
Electric Field ◽  
Schottky Barrier ◽  
Leakage Current ◽  
Schottky Barrier Diodes ◽  
Reverse Leakage Current ◽  
Maximum Electric Field

Large-size (1.7 × 1.7 mm2) β-Ga2O3 field-plated trench MOS-type Schottky barrier diodes with 1.2 kV breakdown voltage and 109 high on/off current ratio

2021 ◽  
Vol 15 (1) ◽  
pp. 016501
Author(s):  
Fumio Otsuka ◽  
Hironobu Miyamoto ◽  
Akio Takatsuka ◽  
Shinji Kunori ◽  
Kohei Sasaki ◽  
...  
Keyword(s):  
Schottky Barrier ◽  
Leakage Current ◽  
Schottky Barrier Diodes ◽  
Wafer Level ◽  
Current Ratio ◽  
Field Plate ◽  
Low Leakage ◽  
Large Size ◽  
Forward Current ◽  
Low Leakage Current

Abstract We fabricated high forward and low leakage current trench MOS-type Schottky barrier diodes (MOSSBDs) in combination with a field plate on a 12 μm thick epitaxial layer grown by halide vapor phase epitaxy on β-Ga2O3 (001) substrate. The MOSSBDs, measuring 1.7 × 1.7 mm2, exhibited a forward current of 2 A (70 A cm−2) at 2 V forward voltage and a leakage current of 5.7 × 10–10 A at −1.2 kV reverse voltage (on/off current ratio of > 109) with an ideality factor of 1.05 and wafer-level specific on-resistance of 17.1 mΩ · cm2.

scholarly journals Analysis of the reverse leakage current in AlGaN/GaN Schottky barrier diodes treated with fluorine plasma

2012 ◽  
Vol 100 (13) ◽  
pp. 132104 ◽  
Author(s):  
Woo Jin Ha ◽  
Sameer Chhajed ◽  
Seung Jae Oh ◽  
Sunyong Hwang ◽  
Jong Kyu Kim ◽  
...  
Keyword(s):  
Schottky Barrier ◽  
Leakage Current ◽  
Schottky Barrier Diodes ◽  
Reverse Leakage Current

Low leakage current Schottky barrier diode

2005 ◽  
Author(s):  
H. Kozaka ◽  
M. Takata ◽  
S. Murakami ◽  
T. Yatsuo
Keyword(s):  
Schottky Barrier ◽  
Leakage Current ◽  
Schottky Barrier Diode ◽  
Low Leakage ◽  
Low Leakage Current

Investigation of Stacking Faults Affecting on Reverse Leakage Current of 4H-SiC Junction Barrier Schottky Diodes Using Device Simulation

2014 ◽  
Vol 778-780 ◽  
pp. 828-831 ◽  
Author(s):  
Junichi Hasegawa ◽  
Kazuya Konishi ◽  
Yu Nakamura ◽  
Kenichi Ohtsuka ◽  
Shuhei Nakata ◽  
...  
Keyword(s):  
Schottky Barrier ◽  
Barrier Height ◽  
Leakage Current ◽  
Schottky Barrier Height ◽  
Schottky Diodes ◽  
Stacking Faults ◽  
Metal Electrode ◽  
Reverse Leakage Current ◽  
Electrode Interface ◽  
The Relationship

We clarified the relationship between the enhanced leakage current of SiC Junction Barrier Schottky diodes and the stacking faults in the SiC crystal at the SiC and metal electrode interface by measuring the electrical and optical properties, and confirm by using the numerical simulations. Numerical simulation considering local lowering of Schottky barrier height, which is 0.8 eV lower than that of 4H-SiC well explained the 2-4 orders of magnitude higher reverse leakage current caused by the SFs. We concluded that the locally lowering of the Schottky barrier height at the 3C-SiC layer in the 4H-SiC surface is a main cause of the large reverse leakage current.

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