Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.

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Improvement of Field Effect Capacity Type Gas Sensor Thermo Inertial Parameters by Using Laser Micromilling Technique

Materials Science Forum ◽

10.4028/www.scientific.net/msf.977.256 ◽

2020 ◽

Vol 977 ◽

pp. 256-260 ◽

Cited By ~ 1

Author(s):

Nikolay Samotaev ◽

Konstantin Oblov ◽

Maya Etrekova ◽

Denis Veselov ◽

Anastasia Ivanova ◽

...

Keyword(s):

Power Consumption ◽

Gas Sensor ◽

Field Effect ◽

Digital Fabrication ◽

Mis Structure ◽

Ceramic Surface ◽

Inertial Parameters ◽

Reduced Power Consumption ◽

Surface Mounting ◽

Laser Micromilling

This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.

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Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages

Proceedings ◽

10.3390/proceedings2019014052 ◽

2019 ◽

Vol 14 (1) ◽

pp. 52 ◽

Cited By ~ 1

Author(s):

Nikolay Samotaev

Keyword(s):

Form Factor ◽

Gas Sensors ◽

Hot Spot ◽

Complete Solution ◽

Spot Size ◽

Smart Phones ◽

Fast Time ◽

3D Design ◽

Mox Sensors ◽

Laser Micromilling

By laser micromilling technology it is possible to fabricate custom MEMS microhotplate platform and also SMD package for MOX sensor, that gives complete solution for integration in mobile devices-smart phones, tablets and etc. The 3D design and fabrication of MEMS microhotplates and packages products occurs simultaneously that give opportunity for ultra-fast time making unique solutions for MOX sensors (number of microhotplates, hot spot size on microhotplates, diameter holes in package cap and etc.) without looking at standard solutions (primarily the package type).

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Technology for SMD Packaging MOX Gas Sensors

Proceedings ◽

10.3390/proceedings2130934 ◽

2018 ◽

Vol 2 (13) ◽

pp. 934 ◽

Cited By ~ 1

Author(s):

Nikolay Samotaev ◽

Konstantin Oblov ◽

Anastasia Ivanova ◽

Boris Podlepetsky ◽

Nikolay Volkov ◽

...

Keyword(s):

Form Factor ◽

Metal Oxide ◽

Gas Sensors ◽

Small Scale ◽

Scale Production ◽

Economic Aspects ◽

Technology Process ◽

Aerosol Printing ◽

Mox Sensors ◽

Laser Micromilling

The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al2O3 ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.

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