The Effect of Substrate Deformation in UV-Nanoimprint Lithography Using a Large Area Stamp

2007 ◽  
Vol 121-123 ◽  
pp. 649-652
Author(s):  
Ki Don Kim ◽  
Young Suk Sim ◽  
Jun Ho Jeong ◽  
Hyun Kee Sohn ◽  
Eung Sug Lee ◽  
...  

We investigated the non-uniformity of the residual layer thickness caused by wafer deformation in an experiment that examined different wafer thicknesses using UV-NIL with an element-wise patterned stamp (EPS). Experiments using the EPS were performed on an EVG®620-NIL. Severe deformation of the wafer served as an obstacle to the spread of resin drops, which caused non-uniformity of the residual layer thickness. We also simulated the imprint process using a simplified model and finite element method to analyze the non-uniformity.

2017 ◽  
Vol 754 ◽  
pp. 206-209 ◽  
Author(s):  
Lucie Malíková ◽  
Stanislav Seitl

A simplified model of a crack approaching a bi-material interface is modelled by means of the finite element method in order to investigate the significance of the higher-order terms of the Williams expansion for the proper approximation of the opening crack-tip stress near the bi-material interface. The discussion on results is presented and the importance of the higher-order terms proved.


2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Venkatesan V. ◽  
Shanmugam S. ◽  
Veerappan AR.

Purpose This paper aims to study the influence of significant design parameters of elephant trunk soft pneumatic actuator and presents maximum optimized geometric structure of the actuator using finite element method. Design/methodology/approach Analysis of variance (ANOVA) is used to examine the influence of significant parameters such as wall thickness, bottom layer thickness and gap between adjacent chambers on the performance of the soft actuator. The most influencing parameter is found to be the wall thickness compared to the gap between adjacent chambers and bottom layer thickness. Findings The optimization of bending moment recommends a wall thickness of 1.5 mm, a gap between the adjacent channels of 1.5 mm and bottom layer thickness of 4 mm for the actuator. The theoretical expression of mechanical parameters is described. Originality/value The design optimization of elephant trunk shaped soft actuator with respect to bending angle and force analysis has not been investigated.


2017 ◽  
Vol 61 (2) ◽  
pp. 115
Author(s):  
Mohamed Latrache ◽  
Mohamed Nadir Amrane

This paper presents a numerical study pertaining to on the active vibration control (AVC) of the 3-D rectangle simply supported plate bonded of the piezoelectric sensor/ actuator pairs. AVC is a large area of interest either in all sections of industry or in research. One way to control the vibration of dynamic systems is by using piezoelectric materials. A finite element method (FEM) analysis is used to model the dynamic behavior of the system. The frequencies of the isotropic pate and a smart structure are verified by the comparison between the analytical calculations and simulation. A LQR controller is designed based on the independent mode space control techniques to stifle the vibration of the system. The change in the sizes of the patches was a clear impact on the control results, and also in the values of the voltage in actuator. The results were established by simulating in ANSYS and MATLAB.


2018 ◽  
Vol 149 ◽  
pp. 02059
Author(s):  
M. Dib ◽  
S. Kouloughli

Stabilizing precarious slopes by installing piles has become a widespread technique for landslides prevention. The design of slope-stabilizing piles by the finite element method is more accurate comparing to the conventional methods. This accuracy is because of the ability of this method to simulate complex configurations, and to analyze the soil-pile interaction effect. However, engineers prefer to use the simplified analytical techniques to design slope stabilizing piles, this is due to the high computational resources required by the finite element method. Aiming to combine the accuracy of the finite element method with simplicity of the analytical approaches, a hybrid methodology to design slope stabilizing piles was proposed in 2012. It consists of two steps; (1): an analytical estimation of the resisting force needed to stabilize the precarious slope, and (2): a numerical analysis to define the adequate pile configuration that offers the required resisting force. The hybrid method is applicable only for the analysis and the design of stabilizing piles placed in the middle of the slope, however, in certain cases like road constructions, piles are needed to be placed at the toe of the slope. Therefore, in this paper a simplified model for the hybrid method is dimensioned to analyze and design stabilizing piles placed at the toe of a precarious slope. The validation of the simplified model is presented by a comparative analysis with the full coupled finite element model.


2008 ◽  
Vol 45 (3) ◽  
pp. 207-218 ◽  
Author(s):  
Akihiko WAKAI ◽  
Norihiro TANAKA ◽  
Shinro ABE ◽  
Hiroyuki YOSHIMATSU ◽  
Kousei YAMABE ◽  
...  

2006 ◽  
Vol 969 ◽  
Author(s):  
Yu-Ming Huang ◽  
Masayuki Sohgawa ◽  
Minoru Noda ◽  
Kaoru Yamashita ◽  
Masanori Okuyama ◽  
...  

AbstractThe Cr/Si bilayer cantilevers for an integrated multi-axis tactile sensor were fabricated by Si surface micromachining process. Among the cantilevers with various shapes, the rectangular and semicircular cantilevers can be deflected upward with good controllability. The maximum deflections are compared with those calculated by finite element method. Calculated deflections of Cr/Si cantilever agree considerably with the measured one. So, it is considered that the analysis by finite element method is useful as optimization of layer thickness and size to obtain the Cr/Si bilayer cantilevers with accurate deflection.


2021 ◽  
Vol 11 (16) ◽  
pp. 7579
Author(s):  
Daniel Szyjewicz ◽  
Łukasz Kuta ◽  
Paulina Działak ◽  
Roman Stopa

Apples are the most popular fruits grown in Polish orchards. In order to obtain the best quality fruit, it is necessary to improve plantation maintenance, fruit harvesting, and processing. Given that many fruits are exposed to external factors, including forces that adversely affect their structure—causing them to crack, bruise, or crush—it is necessary to provide conditions that do not adversely affect their quality. Therefore, the aim of this article was to develop a simplified model of an apple that could be tested under different loads using the finite element method. The parameters of the model were selected to reflect the actual apple as accurately as possible. To assess the apples under impact load, as well as the construction of the FEM model, concrete and wooden substrates were used, where apples were dropped from height of 10 mm and 30 mm. Due to this research, an apple model was obtained that reflects the actual object very well (high R2 coefficient). In addition, the layering and distribution of surface pressures of the real and model objects from the distribution are presented. This shows that the constructed model corresponds to the behaviour of the biological material, subjected to loads in real conditions.


2021 ◽  
Author(s):  
Wanquan Sun ◽  
Zhiqiang Guo ◽  
Zhenyue Ma

Abstract The traditional whole finite element method (WFEM[1]) has several shortcomings, including that it has too many degrees of freedom so the execution is not efficient and is difficult to solve in nonlinear dynamic analysis. In this paper, a novel simplified modeling approach is proposed to investigate the lateral nonlinear vibration characteristics of coupled water turbine generator set shaft-foundation system (CSFS[2]). The simplified coupled model is generated in two stages. First, a more reasonable simplified model for foundation subsystem considering coupling with each other is constructed to simulate the lateral vibrations of guide bearing foundations in hydropower house. Based on the response spectra of WFEM of hydropower house and a constructed energy error objective function, the optimal equivalent parameters of the simplified foundation model are then determined by using the genetic algorithm. Second, considering actions of various nonlinear factors and the pulsating water pressure acting on turbine runner, a nonlinear dynamic differential equations of CSFS based on Lagrange equation are derived. The nonlinear dynamic responses of CSFS using the optimal equivalent model are also compared with the field test data. It is demonstrated that the method proposed to develop the equivalent model is more efficient and more convenient in capturing the nonlinear dynamic behavior of CSFS. In addition, this energy-equivalent model is more adaptable to the stochastic uncertainty and frequency band variation in hydropower station system. Some novel dynamic laws and inner mechanism of the coupled system are also revealed further based on the proposed model. Footnotes: [1] WFEM: whole finite element method[2] CSFS: coupled water turbine generator set shaft-foundation system


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