TEM Investigation of the 3C/6H-SiC Transformation Interface in Layers Grown by Sublimation Epitaxy
2010 ◽
Vol 163
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pp. 97-100
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Keyword(s):
In the present work Conventional and High Resolution Transmission Electron Microscopy has been used to examine the structure and types of interfaces between 3C-SiC and 6H-SiC for samples grown by Sublimation Epitaxy. The layers were grown on on-axis 6H-SiC substrates at different temperature gradients. The changed growth conditions influence on the nucleation of 3C-SiC on the 6H-SiC substrates and their competition with nucleation of 6H-SiC islands. Three specific types of 3C/6H-SiC interfaces were observed and the implications of these observations are discussed.
2010 ◽
Vol 645-648
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pp. 367-370
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1982 ◽
Vol 40
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pp. 722-723
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2002 ◽
Vol 82
(4)
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pp. 735-749
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1993 ◽
Vol 89
(18)
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pp. 3483-3489
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1994 ◽
Vol 57
(4)
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pp. 369-394
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2015 ◽
Vol 95
(3)
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pp. 145-151
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2016 ◽
Vol 30
(20)
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pp. 1650269
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