The surface morphology of film material directly affects its physical performance. It is of great
significance for finding out its prospective physical performance to characterize the surface morphology
of film material. It is hard to characterize them with some conventional methods. The surface morphology
of film material was described from the fractal point of view, and the dimension was correlated with the
resistivity of material. The [100]-orientated diamond film was primarily investigated. The results show
that the greater the crystal grain is, the more uniform and regular the orientation is; and the more compact
the arrangement is, the greater the fractal box dimension is. Moreover, when fractal box dimensions were
within a certain range approximately from 2.92 to 2.97, it presents positively correlative relation with the
logarithm of resistivity, Log(ρ), which resembles the Logistic curve. However, when the other dimensions
are beyond the range mentioned above, resistivity doesn’t change with the increase in dimensions of
fractal. This study will conduce to illustrating the relationship between the structure of crystal exemplified
by arrangement and physical performance as well as material preparation.