Triangulation of 3D Surfaces Described by Stereolithography Files

AlCu Pattern Generation on 3D StructuredWafer Using Multi Level Exposure Method on Electrodeposited Polymer Material

MRS Proceedings ◽

10.1557/proc-766-e5.4 ◽

2003 ◽

Vol 766 ◽

Cited By ~ 1

Author(s):

Vineet Sharma ◽

Arief B. Suriadi ◽

Frank Berauer ◽

Laurie S. Mittelstadt

Keyword(s):

Line Width ◽

Metal Film ◽

Focal Depth ◽

Cost Effective ◽

Pattern Generation ◽

Promising Technique ◽

Critical Dimensions ◽

Exposure Method ◽

Multi Level ◽

3D Surfaces

AbstractNormal photolithography tools have focal depth limitations and are unable to meet the expectations of high resolution photolithography on highly topographic structures. This paper shows a cost effective and promising technique of combining two different approaches to achieve critical dimensions of traces on slope pattern continuity on highly topographic structures. Electrophoretically deposited photoresist is used on 3-D structured wafers. This photoresist coating technique is fairly known in the MEMS industries to achieve uniform and conformal photoresist films on 3D surfaces. Multi step exposures are used to expose electrophoretically deposited photoresist. AlCu (Cu-0.5%), 0.47-0.53 μm thick metal film is deposited on 3D structured silicon substrate to plate photoresist. By combining these two novel methods, metal (AlCu) traces of 75 μm line width and 150 μm pitch (from top flat to down the slope) have been demonstrated on isotropically etched 350 μm deep trenches with 5-10% line width loss.

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Inverse design strategies for 3D surfaces formed by mechanically guided assembly

10.26226/morressier.5f5f8e69aa777f8ba5bd6072 ◽

2020 ◽

Author(s):

Zhichao Fan

Keyword(s):

Inverse Design ◽

Design Strategies ◽

Guided Assembly ◽

3D Surfaces

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2D periodic structures patterned on 3D surfaces by interference lithography for SERS

Applied Surface Science ◽

10.1016/j.apsusc.2018.06.162 ◽

2018 ◽

Vol 461 ◽

pp. 171-174 ◽

Cited By ~ 1

Author(s):

Ivana Lettrichova ◽

Agata Laurencikova ◽

Dusan Pudis ◽

Jozef Novak ◽

Matej Goraus ◽

...

Keyword(s):

Periodic Structures ◽

Interference Lithography ◽

3D Surfaces

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3D-surface MALDI mass spectrometry imaging for visualising plant defensive cardiac glycosides in Asclepias curassavica

Analytical and Bioanalytical Chemistry ◽

10.1007/s00216-021-03177-y ◽

2021 ◽

Vol 413 (8) ◽

pp. 2125-2134

Author(s):

Domenic Dreisbach ◽

Georg Petschenka ◽

Bernhard Spengler ◽

Dhaka R. Bhandari

Keyword(s):

Mass Spectrometry ◽

Mass Spectrometry Imaging ◽

Cardiac Glycosides ◽

Molecular Mechanisms ◽

Plant Science ◽

Primary Metabolism ◽

Native Plant ◽

Asclepias Curassavica ◽

3D Surface ◽

3D Surfaces

AbstractMass spectrometry–based imaging (MSI) has emerged as a promising method for spatial metabolomics in plant science. Several ionisation techniques have shown great potential for the spatially resolved analysis of metabolites in plant tissue. However, limitations in technology and methodology limited the molecular information for irregular 3D surfaces with resolutions on the micrometre scale. Here, we used atmospheric-pressure 3D-surface matrix-assisted laser desorption/ionisation mass spectrometry imaging (3D-surface MALDI MSI) to investigate plant chemical defence at the topographic molecular level for the model system Asclepias curassavica. Upon mechanical damage (simulating herbivore attacks) of native A. curassavica leaves, the surface of the leaves varies up to 700 μm, and cardiac glycosides (cardenolides) and other defence metabolites were exclusively detected in damaged leaf tissue but not in different regions of the same leaf. Our results indicated an increased latex flow rate towards the point of damage leading to an accumulation of defence substances in the affected area. While the concentration of cardiac glycosides showed no differences between 10 and 300 min after wounding, cardiac glycosides decreased after 24 h. The employed autofocusing AP-SMALDI MSI system provides a significant technological advancement for the visualisation of individual molecule species on irregular 3D surfaces such as native plant leaves. Our study demonstrates the enormous potential of this method in the field of plant science including primary metabolism and molecular mechanisms of plant responses to abiotic and biotic stress and symbiotic relationships. Graphical abstract

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