AlCu Pattern Generation on 3D StructuredWafer Using Multi Level Exposure Method on Electrodeposited Polymer Material

2003 ◽  
Vol 766 ◽  
Author(s):  
Vineet Sharma ◽  
Arief B. Suriadi ◽  
Frank Berauer ◽  
Laurie S. Mittelstadt

AbstractNormal photolithography tools have focal depth limitations and are unable to meet the expectations of high resolution photolithography on highly topographic structures. This paper shows a cost effective and promising technique of combining two different approaches to achieve critical dimensions of traces on slope pattern continuity on highly topographic structures. Electrophoretically deposited photoresist is used on 3-D structured wafers. This photoresist coating technique is fairly known in the MEMS industries to achieve uniform and conformal photoresist films on 3D surfaces. Multi step exposures are used to expose electrophoretically deposited photoresist. AlCu (Cu-0.5%), 0.47-0.53 μm thick metal film is deposited on 3D structured silicon substrate to plate photoresist. By combining these two novel methods, metal (AlCu) traces of 75 μm line width and 150 μm pitch (from top flat to down the slope) have been demonstrated on isotropically etched 350 μm deep trenches with 5-10% line width loss.

2010 ◽  
Vol 75 ◽  
pp. 230-239
Author(s):  
Herbert O. Moser ◽  
Linke Jian ◽  
Shenbaga M.P. Kalaiselvi ◽  
Selven Virasawmy ◽  
Sivakumar M. Maniam ◽  
...  

The function of metamaterials relies on their resonant response to electromagnetic waves in characteristic spectral bands. To make metamaterials homogeneous, the size of the basic resonant element should be less than 10% of the wavelength. For the THz range up to the visible, structure details of 50 nm to 30 μm are required as are high aspect ratios, tall heights, and large areas. For such specifications, lithography, in particular, synchrotron radiation deep X-ray lithography, is the method of choice. X-ray masks are made via primary pattern generation by means of electron or laser writing. Several different X-ray masks and accurate mask-substrate alignment are necessary for architectures requiring multi-level lithography. Lithography is commonly followed by electroplating of metallic replica. The process can also yield mould inserts for cost-effective manufacture by plastic moulding. We made metamaterials based on rod-split-rings, split-cylinders, S-string bi-layer chips, and S-string meta-foils. Left-handed resonance bands range from 2.4 to 216 THz. Latest is the all-metal self-supported flexible meta-foil with pass-bands of 45% up to 70% transmission at 3.4 to 4.5 THz depending on geometrical parameters.


2021 ◽  
Vol 40 (1) ◽  
pp. 403-413
Author(s):  
M. Firdouse Ali Khan ◽  
Ganesh Kumar Chellamani ◽  
Premanand Venkatesh Chandramani

Under demand response enabled demand-side management, the home energy management (HEM) schemes schedule appliances for balancing both energy and demand within a residence. This scheme enables the user to achieve either a minimum electricity bill (EB) or maximum comfort. There is always the added burden on a HEM scheme to obtain the least possible EB with comfort. However, if a time window that contains comfortable time slots of the day for an appliance operation, is identified, and if the cost-effective schedule-pattern gets generated from these windows autonomously, then the burden can be reduced. Therefore, this paper proposes a two-level method that can assist the HEM scheme by generating a cost-effective schedule-pattern for scheduling home appliances. The first level uses a classifier to identify the comfortable time window from past ON and OFF events. The second level uses pattern generation algorithms to generate a cost-effective schedule-pattern from the identified window. The generated cost-effective schedule-pattern is applied to a HEM scheme as input to demonstrate the proposed two-level approach. The simulation results exhibit that the proposed approach helps the HEM scheme to schedule home appliances cost-effectively with a satisfactory user-comfort between 90% and 100%.


Fluids ◽  
2018 ◽  
Vol 3 (3) ◽  
pp. 57 ◽  
Author(s):  
Arzu Özbey ◽  
Mehrdad Karimzadehkhouei ◽  
Hossein Alijani ◽  
Ali Koşar

Inertial Microfluidics offer a high throughput, label-free, easy to design, and cost-effective solutions, and are a promising technique based on hydrodynamic forces (passive techniques) instead of external ones, which can be employed in the lab-on-a-chip and micro-total-analysis-systems for the focusing, manipulation, and separation of microparticles in chemical and biomedical applications. The current study focuses on the focusing behavior of the microparticles in an asymmetric curvilinear microchannel with curvature angle of 280°. For this purpose, the focusing behavior of the microparticles with three different diameters, representing cells with different sizes in the microchannel, was experimentally studied at flow rates from 400 to 2700 µL/min. In this regard, the width and position of the focusing band are carefully recorded for all of the particles in all of the flow rates. Moreover, the distance between the binary combinations of the microparticles is reported for each flow rate, along with the Reynolds number corresponding to the largest distances. Furthermore, the results of this study are compared with those of the microchannel with the same curvature angle but having a symmetric geometry. The microchannel proposed in this study can be used or further modified for cell separation applications.


Author(s):  
Jacus S. Nacis ◽  
Marilou R. Galang ◽  
Jason Paolo H. Labrador ◽  
Milflor S. Gonzales ◽  
Aurora Maria Francesca D. Dablo ◽  
...  

AbstractAdvances in nutritional genomics are intended to revolutionize nutrition practice. A basic understanding of nutritional genomics among nutritionist-dietitians is critical for such advancements to occur. As a precedent to the development and integration of gene-based nutrition advice, this study aimed to assess hospital-based nutritionist-dietitians’ perceptions of nutritional genomics. A total of ten focus group discussions (FGDs) with sixty-one registered nutritionist-dietitians (RNDs) from hospitals in the National Capital Region (NCR), Philippines, were conducted from October to November 2019. Data were collected using a pretested semistructured discussion guide, and thematic analysis was subsequently performed. Diverging perceptions about nutritional genomics were noted among the FGD participants. Five themes emerged relating to the enablers and barriers of gene-based nutrition advice: training and capacity building, the extent of information to be disclosed, cost, ethical considerations, and government support. Themes related to the desired features of the gene-based nutrition advice included being consent-driven, cost-effective, technology-oriented, and guided by standards. The results of this study suggest that training and continued learning will equip RNDs to provide nutrition advice based on genetic information. However, other factors, such as cost and ethical considerations, are critical dimensions that need to be acknowledged and addressed before integrating gene-based advice into nutrition practice.


Author(s):  
Rashmi Vohra ◽  
Rita Mittal ◽  
Anupa Sood

Background: To evaluate TVS and SCSH as a screening method in case of AUB and to correlate he findings of TVS and SCSH with hysterectomy specimen.Methods: Present study was conducted in department of obstetrics and gynaecology, Kamla Nehru Hospital for mother and child, IGMC, Shimla for a period of one year. A total of 150 patients with AUB were subjected to TVS and SCSH in same sitting irrespective of their phase of menstrual cycle. All the cases were subjected to hysterectomy within 2 weeks and operative findings were noted. Data was collected and findings analysed.Results: Overall sensitivity of SCSH was found to be 97.6% while that of TVS was 95.1%. The overall specificity of SCSH was found to be 99.6% and that of TVS was 98.2%. PPV, NPV and DA for SCSH was more than that of TVS i.e., 98.9% vs 97.4%, 99.7% vs 99.3% and 99.4% vs 98.7%.Conclusions: SCSH represents a new and promising technique for investigation of the uterine cavity. It is safe, minimally invasive, easy, cost effective and reliable method to diagnose the cause of AUB.


Nanoscale ◽  
2019 ◽  
Vol 11 (17) ◽  
pp. 8433-8441 ◽  
Author(s):  
Hyunsung Jung ◽  
Won Ho Shin ◽  
Tae Wan Park ◽  
Young Joong Choi ◽  
Young Joon Yoon ◽  
...  

Unusual pattern generation of various 2D and 3D nanostructures can be achieved by the multiple self-assembly of block copolymers (BCPs) such as big-dot, double-dot, line-on-dot, pondering, dot-in-honeycomb, dot-in-pondering, and line-on-pondering patterns.


2014 ◽  
Vol 2014 (1) ◽  
pp. 000724-000728 ◽  
Author(s):  
Alvin Lee ◽  
Jay Su ◽  
Kim Arnold ◽  
Dongshun Bai ◽  
Bor Kai Wang ◽  
...  

Thin wafer handling technologies to fabricate silicon interposers have been widely discussed at conferences. Despite tremendous efforts to overcome several technical hurdles such as wafer chipping, cracking, and warpage, high manufacturing costs resulting from the complexity of the processes used to make silicon interposers remains a major concern. Fabricating a through-glass via (TGV) interposer using novel thin wafer handling (TWH) technology will be presented here as an example of a simple and cost-effective solution for realizing 2.5-D IC integration. Utilizing a simplified TWH technology, a TGV interposer with 30-μm-diameter vias to eliminate the isolation layer is combined with polymer-based polybenzoxazole (PBO) as passivation to build one to two redistribution layers (RDLs) with 20-μm line width on both sides after thinning to 100 μm. The simplified TWH requires only a release layer on the glass carrier and another layer of bonding material on the TGV wafer to enable fabrication of a TGV interposer. A process flow for fabricating a TGV interposer utilizing a simplified TWH technology will be presented in detail, including carrier treatment, bonding material, bonding, titanium/copper seed layer deposition, copper plating, RDL deposition, under-bump material (UBM) formation, debonding, and silicon chip stacking on a TGV interposer. The combination of TGV interposer and novel TWH technology will pave the way for cost-effective fabrication in 2.5-D IC.


2021 ◽  
Author(s):  
Diwakar Kafle ◽  
Sushil Dumre ◽  
Saroj Tripathi ◽  
Shankar Shrestha

Abstract Hydrogen production by electrolysis of water is seen as a promising technique as it is environment friendly and it can use renewable energy source for the production of hydrogen gas. However, this technology has less than 4% contribution to the production of commercial hydrogen in the market. This is due to the high electricity consumption of the water splitting reaction. The main challenge to make this technology efficient and economically viable is to develop cost effective and highly efficient electrolyzer. Here we have developed a three electrode electrolyzer in which an extra electrode is inserted between conventional electrodes: cathode and anode. This novel electrolyzer utilizes an extra voltage source which reduces the overpotential and increases the anode current of the cell, which is responsible for the hydrogen production. Furthermore, we observed that, the operating resistance of the cell decreases under the application of the new voltage source. Our results demonstrate that the introduction of third electrode improves the performance of electrolysis by consuming less power as compared to the traditional or conventional two electrode electrolyzer system.


Cytotherapy ◽  
2021 ◽  
Vol 23 (5) ◽  
pp. S198
Author(s):  
M. Shariatzadeh ◽  
K.E. Glen ◽  
R.J. Thomas

RSC Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 4071-4079 ◽  
Author(s):  
Carol M. Olmos ◽  
Ana Peñaherrera ◽  
Gustavo Rosero ◽  
Karla Vizuete ◽  
Darío Ruarte ◽  
...  

This paper describes a methodology of photopolymer mold fabrication with multi-level microstructures for polydimethylsiloxane (PDMS) microfluidic device manufacture.


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