Development of Coaxial Type Thin Film Temperature Sensor with Improved Measurement Accuracy Based on Principle of Thermoelectromotive Force

2018 ◽  
Author(s):  
Daijiro Ishii ◽  
Yuji Mihara
Keyword(s):  
Thin Film ◽  
Temperature Sensor ◽  
Measurement Accuracy ◽  
Thermoelectromotive Force

Laser-annealed thin-film fiber-optic temperature sensor

1994 ◽  
Author(s):  
Glenn Beheim ◽  
Jorge L. Sotomayor ◽  
Meg L. Tuma ◽  
Massood Tabib-Azar
Keyword(s):  
Thin Film ◽  
Temperature Sensor ◽  
Fiber Optic ◽  
Fiber Optic Temperature Sensor ◽  
Fiber Optic Temperature

Integrated Mixing/Reaction Micro Flow Cell for Chemical and Biochemical Applications

1999 ◽  
Author(s):  
Ryosuke Nakamura ◽  
Shuichi Shoji ◽  
Akira Yotsumoto
Keyword(s):  
Thin Film ◽  
Temperature Control ◽  
Temperature Sensor ◽  
Flow Cell ◽  
Reaction Chamber ◽  
Hole Array ◽  
Porous Si ◽  
Micro Flow ◽  
Junction Diode ◽  
Micro Reactor

Abstract An integrated mixing/reaction micro flow cell which consists of a sample/reagent mixing channel, a visible port and a reaction chamber was designed, fabricated and tested. A micro cone hole array of macro porous Si was employed for reagent injection part. A visible light transparent PDMS slab was used as the visible port. A Ti-Pt thin film heater and a p-n junction diode temperature sensor were integrated on the reaction chamber to realize feedback temperature control. Uniform mixing and precise temperature control were realized by the fabricated micro flow cell. The striate and simple microchannel structure of the micro flow cell is suitable for multiplexed micro reactor for chemical and biochemical applications.

Design of Ultra Low Temperature Pressure and Temperature Sensor Structure

2011 ◽  
Vol 80-81 ◽  
pp. 693-697
Author(s):  
Chang Hong Ji ◽  
Bin Zhen Zhang ◽  
Jian Zhang ◽  
Xiang Hong Li ◽  
Jian Lin Liu
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Pressure Sensor ◽  
Temperature Sensor ◽  
Elastic Membrane ◽  
Temperature Influence ◽  
Sensor Sensitivity ◽  
Piezoresistive Pressure Sensor ◽  
Sensor Structure

In order to measure the pressure in the ultra-low temperature condition, the structure of ultra-low temperature piezoresistive pressure sensor is designed. Polysilicon nanometer thin film is used as a varistor according to its temperature and piezoresistive characteristics. The effect of the dimensions of silicon elastic membrane for the sensor sensitivity and the strain dimensions of the elastic membrane are analyzed, then layout position of resistances is arranged. The package structure of pressure sensor is designed. Meanwhile, a low-temperature sensor is designed to compensate the temperature influence to the pressure sensor.

scholarly journals Fabrication and Performance Evaluation of Thin Film RTD Temperature Sensor Array on a Curved Glass Surface

2011 ◽  
Vol 9 (2) ◽  
pp. 34-39 ◽  
Author(s):  
Chul-Hee Ahn ◽  
Hyoung-Hoon Kim ◽  
Sang-Hu Park ◽  
Chang-Min Son ◽  
Jeung-Sang Go
Keyword(s):  
Thin Film ◽  
Performance Evaluation ◽  
Temperature Sensor ◽  
Glass Surface ◽  
Sensor Array ◽  
Curved Glass ◽  
And Performance

TiO2 thin film temperature sensor monitored by smartphone

2018 ◽  
Vol 45 ◽  
pp. 359-362 ◽  
Author(s):  
Tingting Pan ◽  
Wen Cao ◽  
Ming Wang
Keyword(s):  
Thin Film ◽  
Temperature Sensor ◽  
Tio2 Thin Film

scholarly journals Spring Based Connection of External Wires to a Thin Film Temperature Sensor Integrated Inside a Solid Oxide Fuel Cell

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Erdogan Guk ◽  
Vijay Venkatesan ◽  
Yunus Sayan ◽  
Lisa Jackson ◽  
Jung-Sik Kim
Keyword(s):  
Thin Film ◽  
Fuel Cell ◽  
Solid Oxide Fuel Cell ◽  
Temperature Sensor ◽  
Solid Oxide ◽  
Oxide Fuel
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