scholarly journals The Effect of Magnetic Field Direction on the Imaging Quality of Scanning Electron Microscope

2017 ◽  
Vol 22 (1) ◽  
pp. 49-54
Author(s):  
Libo Ai ◽  
Shengxiang Bao ◽  
Yongda Hu ◽  
Xueke Wang ◽  
Chuan Luo
Keyword(s):  
Magnetic Field ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Field Direction ◽  
Magnetic Field Direction ◽  
Imaging Quality ◽  
Scanning Electron

Observability of Very Thick Specimen by Using Transmission Scanning Electron Microscope

1971 ◽  
Vol 29 ◽  
pp. 26-27
Author(s):  
K. Shibatomi ◽  
T. Yamanoto ◽  
H. Koike
Keyword(s):  
Electron Microscope ◽  
Image Quality ◽  
Scanning Electron Microscope ◽  
Chromatic Aberration ◽  
Image Contrast ◽  
Objective Lens ◽  
Thick Specimen ◽  
Transmission Electron ◽  
Scanning Electron

In the observation of a thick specimen by means of a transmission electron microscope, the intensity of electrons passing through the objective lens aperture is greatly reduced. So that the image is almost invisible. In addition to this fact, it have been reported that a chromatic aberration causes the deterioration of the image contrast rather than that of the resolution. The scanning electron microscope is, however, capable of electrically amplifying the signal of the decreasing intensity, and also free from a chromatic aberration so that the deterioration of the image contrast due to the aberration can be prevented. The electrical improvement of the image quality can be carried out by using the fascionating features of the SEM, that is, the amplification of a weak in-put signal forming the image and the descriminating action of the heigh level signal of the background. This paper reports some of the experimental results about the thickness dependence of the observability and quality of the image in the case of the transmission SEM.

The Determination and Application of the Point Spread Function in the Scanning Electron Microscope

2018 ◽  
Vol 24 (4) ◽  
pp. 396-405 ◽  
Author(s):  
Matthew D. Zotta ◽  
Mandy C. Nevins ◽  
Richard K. Hailstone ◽  
Eric Lifshin
Keyword(s):  
Spatial Distribution ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Beam Current ◽  
Beam Shape ◽  
Practical Applications ◽  
Energy Beam ◽  
Working Distance ◽  
Scanning Electron

AbstractA method is presented to determine the spatial distribution of electrons in the focused beam of a scanning electron microscope (SEM). Knowledge of the electron distribution is valuable for characterizing and monitoring SEM performance, as well as for modeling and simulation in computational scanning electron microscopy. Specifically, it can be used to characterize astigmatism as well as study the relationship between beam energy, beam current, working distance, and beam shape and size. In addition, knowledge of the distribution of electrons in the beam can be utilized with deconvolution methods to improve the resolution and quality of backscattered, secondary, and transmitted electron images obtained with thermionic, FEG, or Schottky source instruments. The proposed method represents an improvement over previous methods for determining the spatial distribution of electrons in an SEM beam. Several practical applications are presented.

Qualitative Analysis and Study the Workpiece Shearing Surface Quality of Fine-Blanking with Negative Clearance

2011 ◽  
Vol 697-698 ◽  
pp. 371-376
Author(s):  
Hong Du ◽  
Zhong Mei Zhang
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Qualitative Analysis ◽  
Surface Quality ◽  
Reference Value ◽  
Quality Standard ◽  
Fine Blanking ◽  
Negative Clearance ◽  
Scanning Electron

The workpieces of fine blanking with negative clearance were obtained through the fine-blanking with negative clearance processing experiment. The fractography photographs of workpieces shearing surface were scanned by scanning electron microscope (SEM), and the characterization parameters and quality standard of workpieces shearing surface with negative clearance were analyzed in the processing of blanking. According to the characterization parameters and quality standard of workpieces shearing surface with negative clearance, the workpiece with the length ratio of burnish band, deflection error, rollover error and blanking burr were analyzed qualitative. The findings have a certain reference value to the blanking related profession.

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