Performance Improvement of Aperture Coupled MSA through Si Micromachining

In recent times rectangular patch antenna design has become the most innovative and popular subject due to its advantages, such as being lightweight, conformal, ease to fabricate, low cost and small size. In this paper design of aperture coupled microstrip patch antenna (MSA) on high index semiconductor material coupled with micromachining technique for performance enhancement is discussed. The performance in terms of return loss bandwidth, gain, cross-polarization and antenna efficiency is compared with standard aperture coupled antenna. Micromachining underneath of the patch helps in to reduce the effective dielectric constant, which is desirable for the radiation characteristics of the patch antenna. Improvement 36 percent and 18 percent in return loss bandwidth and gain respectively achieved using micromachined aperture coupled feed patch, which is due to the reduction in losses, suppression of surface waves and substrate modes. In this article along with design, fabrication aspects on Si substrate using MEMS process also discussed. Presented antenna design is proposed antenna can be useful in smart antenna arrays suitable in satellite, radar communication applications. Two topologies at X-band are fabricated and comparison between aperture coupled and micromachined aperture coupled are presented. Index Terms—Microstrip Patch Antenna, Aperture Coupled, Micromachining, High Resistivity Silicon