High-energy Electron Beam Lithography for Nanoscale Fabrication
Cen Shawn
◽
Yoshiyuki Makiuchi
◽
ChiiDong Che
Shunko Magoshi
◽
Shinji Sato
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Kazuo Tawarayama
◽
Yasuhiro Makino
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Hiromi Niiyama
2013 ◽
Vol 31
(1)
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pp. 011605
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Ananthan Raghunathan
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John G. Hartley
Qi Gan
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Zai-Fa Zhou
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Jiang-Yong Pan
Jiang-Yong Pan
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Zai-Fa Zhou
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Qi Gan
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Wen-Qin Xu
2001 ◽
Vol 19
(6)
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pp. 2504
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Erik H. Anderson
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Deirdre L. Olynick
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Weilun Chao
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Bruce Harteneck
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Eugene Veklerov
2008 ◽
Vol 24
(5)
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pp. 2057-2063
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Nikolaj Gadegaard
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Xinyong Chen
◽
Frank J. M. Rutten
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Morgan R. Alexander
2014 ◽
Vol 35
(12)
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pp. 126002
Mingyan Yu
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Shirui Zhao
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Yupeng Jing
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Yunbo Shi
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Baoqin Chen
1994 ◽
Vol 15
(2)
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pp. 81
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Christophe Vieu
◽
Franck Carcenac
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Huguette Launois
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Chantal Fontaine
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Antoine Munoz-Yague
2016 ◽
Vol 27
(48)
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pp. 485301
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Calum Williams
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Richard Bartholomew
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Girish Rughoobur
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George S D Gordon
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Andrew J Flewitt
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...
H. Aisala
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H. Nygren
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T. Seppänen-Laakso
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R-L. Heiniö
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M. Kießling
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...