Cross-sectional observation in nanoscale for Si power MOSFET by atomic force microscopy/Kelvin probe force microscopy/scanning capacitance force microscopy
2019 ◽
Vol 58
(SI)
◽
pp. SIIA04
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Keyword(s):
Keyword(s):
2010 ◽
Vol 28
(3)
◽
pp. C4D24-C4D28
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2017 ◽
Vol 56
(8S1)
◽
pp. 08LB05
◽
1996 ◽
Vol 100
(48)
◽
pp. 18603-18606
◽
2018 ◽
Vol 24
(2)
◽
pp. 126-131
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